Mott High Purity Bulk and Utility Filters for Particle-Free Gas Delivery
Mott High Purity Bulk and Utility Filters provide 9-log filtration of particles at 0.0015 μm resulting in particle-free gas. These bulk filters are ideally suited to the higher temperatures often encountered downstream of a purifier during heated, dry down operations.
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Literature & Data Sheets
Explore Mott’s wide range of high purity filters, diffusers and flow restrictors designed exclusively for semiconductor manufacturers.
» Maximum Operating Pressure: up to 650 psig (44.8 barg)
» Maximum Operating Temperature for Inert Gas: up to 450°C
» Maximum Differential Pressure: up to 250 psid (17.2 barg)
» Hardware: 316L SS
» Filter Medium: 316L SS Fiber or Penta® Nickel
» Wetted Hardware Surface Finish: 10 Ra
» Custom materials also available
Bulk filters with rated flows up to 170,000 SLPM are available. Consult factory or spec sheets for flow curve information.
|Fittings & Dimensions||
BGF-310 & BGF-315
*Custom designs and fittings available.
Videos & Articles
Our Design Capabilities
- Flow/pressure drop curves and filtration efficiency for virtually any system design
- Gas compatibility considerations
- Custom filter media, pressure vessel, and fitting material and configurations available
Design Expertise – From start to finish, we customize bulk filter solutions based on your design parameters. Challenge us!
Quality Certifications – Need markings for conformity to health, safety, and environmental standards like CE? We’ve got you covered.
Extensive Partner Network – If a bulk filter material isn’t listed or a capability isn’t in-house, we have an extensive network of partners for material procurement, advanced manufacturing, and validation testing.
Engineering Support – Our project engineers are on hand to consult about your process and help you select the ideal bulk & utility filter for your application.
FAQs: Bulk Gas Filters & Filtration
Q: What is a bulk filter in the context of ultra-high purity applications?
A: A bulk filter is a specialized filtration device designed to handle large volumes of gas, ensuring the removal of contaminants and impurities, especially in ultra-high purity applications like semiconductor manufacturing.
Q: How does Mott’s bulk filter ensure 9-log filtration?
A: Mott’s bulk filters are engineered with advanced porous metal technology, allowing them to achieve 9-log filtration. Mott filters are manufactured to the highest quality and the highest precision porosity in the market. This ensures that the gas passing through is of the highest purity, free from particles and contaminants.
Q: Are Mott’s bulk filters compatible with various semiconductor process gases?
A: Yes, Mott’s bulk filters are designed to be compatible with all high purity semiconductor process gases, ensuring versatility and reliability in a range of challenging applications. Mott filters are used in the most challenging chip manufacturing process, including advanced node technologies < 7nm.
Q: How do Mott’s bulk filters contribute to faster “dry down” times?
A: Mott’s bulk filters are crafted with materials and designs that allow for quick “dry down,” meaning they achieve optimal performance in minutes rather than hours, reducing downtime and increasing efficiency.
Q: Can Mott’s bulk filters handle corrosive gases?
A: Absolutely. Mott’s bulk filters are available in various materials, including Stainless Steel, Hastelloy®, and Penta® Nickel, making them suitable for handling a range of gases, including corrosive ones.
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