High Purity Gas Flow Restrictors
Mott GSMR Series flow restrictors support 1.125” high-flow C-Seal configuration gas systems. These restrictors are assembled and tested in a Class 100 clean room environment and are mounted between the substrate and another two-port, surface-mount component.
The Mott VCR® fitting gas flow restrictor provides a compact, long-lasting flow control which can withstand sustained temperatures as high as 450°C (inert gas) and pressures to 120 psig. Mott can also supply restrictors that withstand pressures up to 1500 psig by request.
Custom materials, porosity and hardware configurations are available upon request.
Questions? Call 860.747.6333 Today!
Literature & Data Sheets
Typical Applications
Semiconductor Catalog
Explore Mott’s wide range of high purity filters, diffusers and flow restrictors designed exclusively for semiconductor manufacturers.
High Purity Gas Flow Restrictors
Calibrated Gas Flow Restrictors, 316L Stainless Steel, Hastelloy® or Nickel media, 1/4" or 1/2" Face Seal Union, custom designs available
Surface Mount Restrictors
Overview of surface mount flow restrictor offering.
Product Specs
| Operating Conditions |
Surface Mount Restrictors » Maximum Operating Temperature for Inert Gas: 460°C » Maximum Operating Pressure: 1,200 psig » Maximum Differential Pressure: 1,200 psid » Burst Pressure: 20,000 psig » Std Downstream Flow Rates: From 50 slpm (higher flows available) » Flow tolerance: +/- 7% of rated flow at rated pressure (+/- 2% available upon request) VCR Restrictors » Maximum Operating Temperature for Inert Gas: 460°C » Maximum Operating Pressure: 1,500 psig » Maximum Differential Pressure: 1,500 psid » Burst Pressure: 7,000 psig » Std Downstream Flow Rates: From 50 slpm (higher flows available) » Flow tolerance: +/- 7% of rated flow at rated pressure (+/- 2% available upon request) |
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| Materials |
» Housing: 316LSS » Filter Medium: 316L SS » Wetted Hardware Surface Finish: 10 Ra, Electro-polished |
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| Fittings & Dimensions for Modular Mount Restrictor |
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| Fittings & Dimensions for VCR® Restrictors |
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Our Design Capabilities
In order to design your surface mount flow restrictor, we need to know:
- The process gas being used
- Flow rate: sccm
- Inlet pressure: psig
- Outlet pressure, if other than atmosphere
Mott GSMR restrictors are calibrated on the following gases: Argon, Nitrogen, Hydrogen, Oxygen, Helium, and Air. All other gases are calibrated using viscosity curves.
Relevant Services
Engineering Support – Utilize our expert project engineers to discuss your process and design the right filter elements to maximize flow and particle capture.
