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Ultra High Purity Porous Ceramics

Mott’s Ultra High Purity Porous Ceramics can be customized to your application requirements. Ceramic technology offers a wide variety of chemical compatibilities as well as durability in high temperature and pressure applications.  Best in class cleanliness is achieved by manufacturing in Class 100 clean room environment with >99.5% pure alumina.

Porous alumina (or aluminum oxide Al2O3) ceramics offer outstanding properties for mechanical strength, wear resistance, and corrosive environments.  High purity alumina materials are excellent for making parts for CVD process, ion implants and many other semiconductor process components.

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Literature & Data Sheets

Typical Applications

  • Electrostatic Chuck Conduits and Feed Systems
  • Ultra High Purity Gas Diffusion
  • High Temperature Liquid Filtration
  • Semiconductor Wafer Fabrication Components
  • CVD Equipment Parts
  • Electronic Components and Substrates
  • Gas Flow Plugs and Ports

Semiconductor Products Catalog

Explore Mott’s wide range of high purity filters, diffusers and flow restrictors designed exclusively for semiconductor manufacturers.

Product Specs

Operating Conditions

» Maximum Operating Pressure: 5,000 psi

» Maximum Operating Temperature: 2,750°F (1,500°C)

» Maximum Differential Pressure: 1,250 psi

Specifications
Flux Up to 71.6 SCCM He/cm2 at 8 Torr
Part-to-Part Variability <10% at 3-sigma
Material Purity >99.5% Al2O3
Pore Size 0.2 – 5 MG
Density 35%+
Geometries

Small Tubes/Bushings

Plates

Discs

  • Download cutsheet for specifications

Our Design Capabilities

  • Flow/pressure drop curves and filtration efficiency for virtually any design
  • Gas compatibility considerations
  • Custom filter media, pressure vessel, and fitting material and configurations available

Relevant Services

Design Expertise – From start to finish, we customize solutions based on your design parameters – challenge us!

Lab Testing – If you need data packages or feasibility testing for your part prior to installation, we’re happy to work with you.  We’ll use our lab center to perform various characterization and performance tests to ensure your parts are meeting strict specifications prior to you receiving them.

Engineering Support – Utilize our project engineers to consult about your process and select the right porous ceramic product design for your application.