Ultra High Purity Porous Ceramics

Mott’s ultra high purity porous ceramics can be customized to your unique application requirements. Ceramic technology offers a wide variety of chemical compatibilities as well as durability in high temperature and pressure applications. High purity porous ceramics are rated with a maximum operating temperature of 2,750 degrees Fahrenheit and a maximum operating pressure of 5,000 psi. They also have high geometric flexibility and can be used as either small tubes or bushings, discs, or plates. The durability and versatility of porous ceramics allow for many capabilities across various industries. Best in class cleanliness is achieved by manufacturing in Class 100 clean room environment with >99.5% pure alumina.

Porous alumina (or aluminum oxide Al2O3) ceramics offer outstanding properties for mechanical strength, wear resistance, and corrosive environments. High alumina ceramic material is valuable across many industries because it has high stability at elevated temperatures, high hardness, excellent corrosion resistance, low thermal expansion coefficient, and a high melting point. For these reasons, high purity alumina materials are excellent for making parts for CVD processes, ion implants, and many other semiconductor process components.

Top Tier Products

At Mott, we are proud to supply high-quality products that have been implemented across several industries for decades. Our high purity porous ceramics are rated highly in several areas, ensuring they will stand up to the demands that your machinery requires. We also can develop additional geometries of our ultra high purity porous ceramics. Mott sales representatives are happy to have a conservation with you to determine if our capabilities align with your needs!

 

 

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Literature & Data Sheets

Typical Applications

  • Electrostatic Chuck Conduits and Feed Systems
  • Ultra High Purity Gas Diffusion
  • High Temperature Liquid Filtration
  • Semiconductor Wafer Fabrication Components
  • CVD Equipment Parts
  • Electronic Components and Substrates
  • Gas Flow Plugs and Ports

Semiconductor Products Catalog

Explore Mott’s wide range of high purity filters, diffusers and flow restrictors designed exclusively for semiconductor manufacturers.

Product Specs

Operating Conditions

» Maximum Operating Pressure: 5,000 psi

» Maximum Operating Temperature: 2,750°F (1,500°C)

» Maximum Differential Pressure: 1,250 psi

Specifications
Flux Up to 71.6 SCCM He/cm2 at 8 Torr
Part-to-Part Variability <10% at 3-sigma
Material Purity >99.5% Al2O3
Pore Size 0.2 – 5 MG
Density 35%+
Geometries

Small Tubes/Bushings

Plates

Discs

  • Download cutsheet for specifications

Our Design Capabilities

  • Flow/pressure drop curves and filtration efficiency for virtually any design
  • Gas compatibility considerations
  • Custom filter media, pressure vessel, and fitting material and configurations available

Relevant Services

Design Expertise – From start to finish, we customize solutions based on your design parameters. We look forward to facing any challenge our clients present. Our dedicated team does not shy away from a difficult task, nor will we compromise quality for simplicity.

Lab Testing – If you need data packages or feasibility testing for your part prior to installation, we’re happy to work with you. We’ll use our lab center to perform various characterization and performance tests to ensure your parts are meeting strict specifications prior to you receiving them. This testing will determine the exact capabilities of the products we have developed for you. This way, you’ll be able to understand their limitations before they can cause any costly repairs due to overwork or overstress.

Engineering Support – Utilize our project engineers to consult about your process and select the right porous ceramic product design for your application. There are many different areas of customization for our ceramic products and our expert engineers’ goal is to ensure that the products you order are explicitly tailored to your needs.