High Purity Filters & Components

High Purity and Ultra High Purity Point-of-Use, Micro-Bulk and Surface Mount Gas Purifiers meet your specific requirements and uphold the highest standard of purity for any gas delivery system.

UHP Point-of-Use Filters used in gas sticks for equipment hookup, valve manifold boxes, gas cabinets, tool isolation gas boxes, and on-board OEM tool gas boxes

Spool piece design flow restrictors supporting 1.125” high flow C-seal configuration gas systems and VCR® fitting gas flow restrictors

Allow process or atmospheric gas to be introduced into a vacuum chamber without excess turbulence

Ultra high purity porous ceramic elements have pore sizes from 0.2 to 5 media grade.  Porous-to-solid dual density designs are available.

Designed to accommodate flows from 1,000-250,000 slpm with 316L SS or nickel filter elements. Other metal gas filter designs are available for higher pressures or highly corrosive gases

Compatible with Integrated Gas System (IGS) interfaces in process tools, gas cabinets, and valve manifold box installations

Compact design accommodates 1/4" and 1/2" face seal fittings without adding length to the gas system. Standard flow rates for gasket filters are 1, 3, and 20 SLPM

Engineered filters customized for your unique requirements