Ultra High Purity Products

UHP Point of Use Filters for: gas sticks for equipment hookup, valve manifold boxes, gas cabinets, tool isolation gas boxes, and on-board OEM tool gas boxes.

Spool piece design flow restrictors supporting 1.125” high flow C-seal configuration gas systems and VCR® fitting gas flow restrictors.

Allows process or atmospheric gas to be introduced into a vacuum chamber without excess turbulence.

These filters are designed to accommodate flows from 1,000 to 100,000 slpm with 316L SS or nickel filter elements. Other metal gas filter designs are available for higher pressures or highly corrosive gases.

Our surface mount filters are designed for compatibility with Integrated Gas System (IGS) interfaces in process tools, gas cabinets and valve manifold box installations.

Gasket Filters with compact design to fit inside 1/4" and 1/2" face seal fittings and not add length to the gas system. Standard flow rates for gasket filters are 1, 3, and 20 SLPM.

An engineered filter for your unique needs.