Ultra High Purity Products
Mott offers all-metal gas filters and filtration systems in configurations ranging from 1-200,000 slpm. Materials of construction include nickel, 316LSS and Hastelloy® which provide highly efficient filtration for processes used in the production of integrated circuits.
High Purity and Ultra High Purity Point-of-Use, Micro-Bulk and Surface Mount Gas Purifiers meet specific requirements and uphold the highest standard of purity for any gas delivery system.
GasShield® Point-of-Use Filters
UHP Point-of-Use Filters used in gas sticks for equipment hookup, valve manifold boxes, gas cabinets, tool isolation gas boxes, and on-board OEM tool gas boxes
High Purity Flow Restrictors
Spool piece design flow restrictors supporting 1.125” high flow C-seal configuration gas systems and VCR® fitting gas flow restrictors
GasShield® Chamber Diffusers
Allow process or atmospheric gas to be introduced into a vacuum chamber without excess turbulence
GasShield® Bulk and Utility Filters
Designed to accommodate flows from 1,000-250,000 slpm with 316L SS or nickel filter elements. Other metal gas filter designs are available for higher pressures or highly corrosive gases
GasShield® Surface Mount Filters
Compatible with Integrated Gas System (IGS) interfaces in process tools, gas cabinets, and valve manifold box installations
GasShield® Gasket Filters
Compact design accommodates 1/4" and 1/2" face seal fittings without adding length to the gas system. Standard flow rates for gasket filters are 1, 3, and 20 SLPM