Ultra High Purity Products
All-metal gas filters and systems in configurations ranging from 1 slpm to 200,000 slpm. Materials of construction include nickel, 316LSS and Hastelloy® which provide highly efficient filtration for processes used in the production of integrated circuits.
GasShield® Point of Use Filters
UHP Point of Use Filters for: gas sticks for equipment hookup, valve manifold boxes, gas cabinets, tool isolation gas boxes, and on-board OEM tool gas boxes.
High Purity Flow Restrictors
Spool piece design flow restrictors supporting 1.125” high flow C-seal configuration gas systems and VCR® fitting gas flow restrictors.
GasShield® Chamber Diffusers
Allows process or atmospheric gas to be introduced into a vacuum chamber without excess turbulence.
GasShield® Bulk & Utility Filters
These filters are designed to accommodate flows from 1,000 to 100,000 slpm with 316L SS or nickel filter elements. Other metal gas filter designs are available for higher pressures or highly corrosive gases.
GasShield® Surface Mount Filters
Our surface mount filters are designed for compatibility with Integrated Gas System (IGS) interfaces in process tools, gas cabinets and valve manifold box installations.
GasShield® Gasket Filters
Gasket Filters with compact design to fit inside 1/4" and 1/2" face seal fittings and not add length to the gas system. Standard flow rates for gasket filters are 1, 3, and 20 SLPM.