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Semiconductor Tools

As a trusted supplier to the world’s top semiconductor tool manufacturers, Mott products can be found in most semiconductor tools. Our high purity porous products provide industry-leading 9-log filtration of particles as small as 0.0015 μm, to maximize wafer yield.

Our diffusers are guaranteed to withstand three million vent-up cycles, and have been proven to increase wafer throughput as much as 20% by reducing vent and backfill times without creating particle disturbances in the load lock or chamber.

Our point-of-use filters, available in Stainless Steel, Hastelloy®, and Penta® Nickel, enable dry down in minutes, not hours. And, our Precision Flow Restrictors are ideal to control chamber backfill and flow splitting, offering clog-free performance and laminar flow engineered to your flow requirements. All Mott products are available in a variety of materials to meet your unique specifications.

Information Request

Have a question? Can’t find what you’re looking for? Call us at 860.747.6333, or submit an information request form and someone will get back to you within 48 hours.

Related Resources

Typical Applications:

  • CVD Reactors
  • EPI Reactors
  • Oxidation/Diffusion Furnaces
  • Plasma Etchers/Strippers
  • Sputtering Equipment
  • Ion Implementation Equipment
  • Wafer Track Equipment

Semiconductor Catalog

Explore Mott’s wide range of high purity filters, diffusers and flow restrictors designed exclusively for semiconductor manufacturers.

Lab & Engineering Services

Discover our entire range of services, including rapid prototyping, filter feasibility, media characterization and more.