Semiconductor Tools
As a trusted supplier to the world’s top semiconductor tool manufacturers, Mott products can be found in most semiconductor tools. Our high purity porous products provide industry-leading 9-log filtration of particles as small as 0.0015 μm, to maximize wafer yield.
Our diffusers are guaranteed to withstand three million vent-up cycles, and have been proven to increase wafer throughput as much as 20% by reducing vent and backfill times without creating particle disturbances in the load lock or chamber.
Our point-of-use filters, available in Stainless Steel, Hastelloy®, and Penta® Nickel, enable dry down in minutes, not hours. And, our Precision Flow Restrictors are ideal to control chamber backfill and flow splitting, offering clog-free performance and laminar flow engineered to your flow requirements. All Mott products are available in a variety of materials to meet your unique specifications.
Information Request
Related Resources
Typical Applications:
- CVD Reactors
- EPI Reactors
- Oxidation/Diffusion Furnaces
- Plasma Etchers/Strippers
- Sputtering Equipment
- Ion Implementation Equipment
- Wafer Track Equipment
Semiconductor Catalog
Explore Mott’s wide range of high purity filters, diffusers and flow restrictors designed exclusively for semiconductor manufacturers.
Lab & Engineering Services
Discover our entire range of services, including rapid prototyping, filter feasibility, media characterization and more.
