Semiconductor Tools

Mott high purity porous products provide industry-leading 9-log filtration to 0.0015 μm particles, to eliminate die-killer particles and increase wafer yield. As a trusted supplier to the world’s top semiconductor tool manufacturers, Mott products can be found in most semiconductor tools. Mott porous products offer industry-leading 0.0015 μm particle capture and unparalleled quality and strength. Mott Diffusers are guaranteed to withstand 3 million vent up cycles, and have been proven to increase wafer throughput as much as 20% by reducing vent and backfill times without creating particle disturbances in the load lock or chamber. Mott Point-of-Use Filters allow for dry down in minutes, not hours and are available for low to high flow applications in Stainless Steel, Hastelloy®, and Penta® Nickel.  Mott Precision Flow Restrictors are ideal for control of chamber backfill and flow splitting, offering clog-free performance and laminar flow engineered to your flow requirements. All Mott products are available in several materials in order to meet your specs.