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Semiconductor Tools

Mott high purity porous products provide industry-leading 9-log filtration to 0.0015 μm particles, to eliminate die-killer particles and increase wafer yield. As a trusted supplier to the world’s top semiconductor tool manufacturers, Mott products can be found in most semiconductor tools. Mott porous products offer industry-leading 0.0015 μm particle capture and unparalleled quality and strength. Mott Diffusers are guaranteed to withstand 3 million vent up cycles, and have been proven to increase wafer throughput as much as 20% by reducing vent and backfill times without creating particle disturbances in the load lock or chamber. Mott Point-of-Use Filters allow for dry down in minutes, not hours and are available for low to high flow applications in Stainless Steel, Hastelloy®, and Penta® Nickel.  Mott Precision Flow Restrictors are ideal for control of chamber backfill and flow splitting, offering clog-free performance and laminar flow engineered to your flow requirements. All Mott products are available in several materials in order to meet your specs.

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Related Resources

Typical Applications:

  • CVD Reactors
  • EPI Reactors
  • Oxidation/Diffusion Furnaces
  • Plasma Etchers/Strippers
  • Sputtering Equipment
  • Ion Implementation Equipment
  • Wafer Track Equipment

Semiconductor Catalog

Mott Filter and Flow Control Products for the Semiconductor Industry Products: High Purity Filters, Diffusers, and Flow Restrictors

Lab & Engineering Services

Rapid Prototyping, SEM/EDS Analysis, Cleanliness Testing, Quantitative Chemical Analysis, Filtration Performance and Feasibility Testing, Mechanical Properties Testing, Media Characterization, Failure Analysis and Lifecycle Testing, Metallography