High Purity Gas Flow Restrictors
The Mott GSMR Series flow restrictors support the 1.125” high-flow C-Seal configuration gas systems. These restrictors are assembled and tested in a Class 100 clean room environment, and are mounted between the substrate and another two-port surface mount component.
The Mott VCR® fitting gas flow restrictor provides a compact, long-lasting flow control which can withstand sustained temperatures to 450°C (inert gas) and pressures to 120 psig. Mott can supply restrictors that withstand pressures up to 1500 psig by request.
As always, custom materials, porosity and hardware configurations are available upon request.
Questions? Call 860.747.6333 Today!
Literature & Data Sheets
Mott Semiconductor Products Catalog
Mott Filter and Flow Control Products for the Semiconductor Industry Products: High Purity Filters, Diffusers, and Flow Restrictors
High Purity Gas Flow Restrictors
If you are looking for a low-cost option to achieve consistent flow control and resistance to clogging, explore our high purity porous metal flow restrictors.
High Purity Surface Mount Flow Restrictors
The Mott GSMR Series flow restrictors support the 1.125” high-flow C-Seal configuration gas systems.
Product Specs
| Operating Conditions |
Surface Mount Restrictors » Maximum Operating Temperature for Inert Gas: 460°C » Maximum Operating Pressure: 1,200 psig » Maximum Differential Pressure: 1,200 psid » Burst Pressure: 20,000 psig » Std Downstream Flow Rates: From 50 slpm (higher flows available) » Flow tolerance: +/- 7% of rated flow at rated pressure (+/- 2% available upon request) VCR Restrictors » Maximum Operating Temperature for Inert Gas: 460°C » Maximum Operating Pressure: 1,500 psig » Maximum Differential Pressure: 1,500 psid » Burst Pressure: 7,000 psig » Std Downstream Flow Rates: From 50 slpm (higher flows available) » Flow tolerance: +/- 7% of rated flow at rated pressure (+/- 2% available upon request) |
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| Materials |
» Housing: 316L SS » Filter Medium: 316L SS » Wetted Hardware Surface Finish: 10 Ra » Nickel, Hastelloy®, and other materials available contact us |
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| Fittings & Dimensions for Modular Mount Restrictor |
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| Fittings & Dimensions for VCR® Fitting Restrictor |
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Our Design Capabilities
In order to design your in-line or surface mount flow restrictor, please provide:
- The process gas being used
- Flow rate: sccm
- Inlet pressure: psig
- Outlet pressure, if other than atmosphere
Mott in-line and GSMR restrictors are calibrated on the following gases: Argon, Nitrogen, Hydrogen, Oxygen, Helium, and Air. All other gases are calibrated using viscosity curves.
Relevant Services
Design Expertise – From start to finish, we customize solutions based on your design parameters – challenge us!
Fluid Modeling – Our extensive applications have built a library of data to increase the accuracy of our flow models to provide initial performance and feasibility estimates prior to building prototypes.
Extensive Partner Network – If a material is not listed or capability not in-house, we maintain an extensive network of partners for new material procurement, advanced manufacturing capabilities, and validation testing.
Engineering Support – Utilize our expert project engineers to design the right restrictor for you application.
