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GasShield® Surface Mount Filters

Mott GasShield® Surface Mount Filters provide industry leading 0.0015 μm filtration for integrated gas systems used on board semiconductor OEM tools. GasShield Surface Mount Filters are for dimensions of two port components for 1.125” and 1.5” four fastener surface mount gas distribution systems with the C-seal and W-seal configurations and are compatible with all inert gases and most specialty gases.

Information Request

Have a question? Can’t find what you’re looking for? Call us at 860.747.6333, or submit an information request form and someone will get back to you within 48 hours.

Literature & Data Sheets

Typical Applications

For use with W-seal and C-seal, 1.125” and 1.5” surface mount modular gas delivery systems.

Product Specs

Operating Conditions

» Maximum Operating Pressure: 1800 psig (124.1 barg)

» Maximum Operating Temperature for Inert Gas: 460°C

» Maximum Differential Pressure: 500 psid (34.4 bar)

Materials

» Hardware: 316LSS or Hastelloy C-22

» Filter Medium: Penta® Nickel, 316L SS or Hastelloy® C-22

» Wetted Hardware Surface Finish: 5 Ra, Electro-polished

» Custom materials contact us

Specifications
Particle Removal Size: ≥ 0.0015 μm
Helium Leak Rating: 1 x 10-9 atm cc/sec
Moisture Contribution: <10 ppb after 1 hour at low-flow ambient purge per SEMI F27 test method
Total Hydrocarbons: Below detectable limits per SEMASPEC 90120396B test method
Particle Shedding: Zero particle contribution above background (<1 particle/ft³) per SEMI F43-0308 test method
Flow Data

More flow curves available, consult factory or spec sheets.

Fittings & Dimensions

GSMM-75 C-seal for 1.125”

Part Description Fitting Type Filter Material Housing Material Filter Design Flow Rating (SLPM) Overall Height (Inches)
GSMM-75-020-12
GSMM-75-030-12
GSMM-75-050-12
C-seal Nickel 316L SS 1.125” 20-50 1.6-4.0
GSMM-75-010-11
GSMM-75-030-11
C-seal 316L SS 316L SS 1.125” 10-30 2.4-4.0
GSMM-75-010-33
GSMM-75-030-33
C-seal Hastelloy®
C-22
Hastelloy
C-22
1.125” 10-30 2.4-4.9

 

GSMM-60 C-seal for 1.500”

Part Description Fitting Type Filter Material Housing Material Filter Design Flow Rating (SLPM) Overall Height (Inches)
GSMM-60-010-12
GSMM-60-050-12
GSMM-60-100-12
C-seal Nickel 316L SS 1.500” 10-100 1.3-4.5
GSMM-60-010-11
GSMM-60-020-11
GSMM-60-075-11
C-seal 316L SS 316L SS 1.500” 10-75 2.2-5.8
GSMM-60-010-33
GSMM-60-020-33
GSMM-60-075-33
C-seal Hastelloy
C-22
Hastelloy
C-22
1.500” 10-75 2.4-6.1

 

GSMM-55 W-Seal for 1.125”

Part Description Fitting Type Filter Material Housing Material Filter Design Flow Rating (SLPM) Overall Height (Inches)
GSMM-55-020-12
GSMM-55-030-12
GSMM-55-050-12
W-seal Nickel 316L SS 1.125” 20-50 1.7-4.2
GSMM-55-010-11
GSMM-55-030-11
GSMM-55-050-11
C-seal 316L SS 316L SS 1.125” 10-50 2.6-4.0
GSMM-60-010-33
GSMM-60-020-33
GSMM-60-075-33
C-seal Hastelloy
C-22
Hastelloy
C-22
1.125” 10-30 2.5-5.0

 

GSMM-50 W-seal for 1.500”

Part Description Fitting Type Filter Material Housing Material Filter Design Flow Rating (SLPM) Overall Height (Inches)
GSMM-50-010-12
GSMM-50-050-12
GSMM-50-100-12
W-seal Nickel 316L SS 1.500” 10-100 1.3-4.5
GSMM-50-010-11
GSMM-50-020-11
GSMM-50-030-11
GSMM-50-075-11
W-seal 316L SS 316L SS 1.500” 10-75 2.2-5.8
GSMM-50-010-33
GSMM-50-020-33
GSMM-50-075-33
C-seal Hastelloy
C-22
Hastelloy
C-22
1.500” 10-75 2.2-6.1

*Custom designs and fittings available.

Our Design Capabilities

  • Flow/pressure drop curves and filtration efficiency for virtually any system design
  • Gas compatibility considerations
  • Custom filter media, pressure vessel, and fitting material and configurations available

Relevant Services

Design Expertise – From start to finish, we customize solutions based on your design parameters – challenge us!

Fluid Modeling – Our extensive applications have built a library of data to increase the accuracy of our flow models to provide initial performance and feasibility estimates prior to building prototypes.

Extensive Partner Network – If a material is not listed or capability not in-house, we maintain an extensive network of partners for new material procurement, advanced manufacturing capabilities, and validation testing.

Engineering Support – Utilize our expert engineers to consult your process and select the right surface mount filter for your application.