GasShield® Surface Mount Filters
Mott GasShield® Surface Mount Filters provide industry-leading 0.0015 μm filtration for integrated gas systems used in semiconductor OEM tools. GasShield Surface Mount Filters accommodate dimensions of two-port components for 1.125” and 1.5” four-fastener, surface-mount gas distribution systems with C-seal and W-seal configurations and are compatible with all inert gases and most specialty gases.
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Literature & Data Sheets
For use with W-seal and C-seal, 1.125” and 1.5” surface mount modular gas delivery systems.
Explore Mott’s wide range of high purity filters, diffusers and flow restrictors designed exclusively for semiconductor manufacturers.
» Maximum Operating Pressure: 1800 psig (124.1 barg)
» Maximum Operating Temperature for Inert Gas: 460°C
» Maximum Differential Pressure: 500 psid (34.4 bar)
» Hardware: 316LSS or Alloy 22*
» Filter Medium: Penta® Nickel, 316L SS or Alloy 22*
» Wetted Hardware Surface Finish: 5 Ra
» Custom materials also available
*Alloy 22 or UNS N06022 is a nickel-chromium-molybdenum super-alloy commonly referred to as Hastelloy® C-22®
More flow curves available, consult factory or spec sheets.
|Fittings & Dimensions||
GSMM-75 C-seal for 1.125”
GSMM-60 C-seal for 1.500”
GSMM-55 W-Seal for 1.125”
GSMM-50 W-seal for 1.500”
*Custom designs and fittings available.
Videos & Articles
Our Design Capabilities
- Flow/pressure drop curves and filtration efficiency for virtually any system design
- Gas compatibility considerations
- Custom filter media, pressure vessel, and fitting material and configurations available
Design Expertise – From start to finish, we customize solutions based on your design parameters – challenge us!
Fluid Modeling – Our extensive applications have built a library of data to increase the accuracy of our flow models to provide initial performance and feasibility estimates prior to building prototypes.
Extensive Partner Network – If a material is not listed or capability not in-house, we maintain an extensive network of partners for new material procurement, advanced manufacturing capabilities, and validation testing.
Engineering Support – Utilize our expert engineers to design the right surface mount filter for your application.
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