GasShield® Surface Mount Filters
Mott GasShield® Surface Mount Filters provide industry leading 0.0015 μm filtration for integrated gas systems used on board semiconductor OEM tools. GasShield Surface Mount Filters are for dimensions of two port components for 1.125” and 1.5” four fastener surface mount gas distribution systems with the C-seal and W-seal configurations and are compatible with all inert gases and most specialty gases.
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Literature & Data Sheets
Typical Applications
For use with W-seal and C-seal, 1.125” and 1.5” surface mount modular gas delivery systems.
Product Specs
| Operating Conditions |
» Maximum Operating Pressure: 1800 psig (124.1 barg) » Maximum Operating Temperature for Inert Gas: 460°C » Maximum Differential Pressure: 500 psid (34.4 bar) |
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| Materials |
» Hardware: 316LSS or Hastelloy C-22 » Filter Medium: Penta® Nickel, 316L SS or Hastelloy® C-22 » Wetted Hardware Surface Finish: 5 Ra, Electro-polished » Custom materials contact us |
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| Specifications |
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| Flow Data |
More flow curves available, consult factory or spec sheets. |
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| Fittings & Dimensions |
GSMM-75 C-seal for 1.125”
GSMM-60 C-seal for 1.500”
GSMM-55 W-Seal for 1.125”
GSMM-50 W-seal for 1.500”
*Custom designs and fittings available. |
Videos & Articles
Our Design Capabilities
- Flow/pressure drop curves and filtration efficiency for virtually any system design
- Gas compatibility considerations
- Custom filter media, pressure vessel, and fitting material and configurations available
Relevant Services
Design Expertise – From start to finish, we customize solutions based on your design parameters – challenge us!
Fluid Modeling – Our extensive applications have built a library of data to increase the accuracy of our flow models to provide initial performance and feasibility estimates prior to building prototypes.
Extensive Partner Network – If a material is not listed or capability not in-house, we maintain an extensive network of partners for new material procurement, advanced manufacturing capabilities, and validation testing.
Engineering Support – Utilize our expert engineers to consult your process and select the right surface mount filter for your application.
