GasShield® Surface Mount Filters
Mott GasShield® Surface Mount Filters provide industry leading 0.0015 μm filtration for integrated gas systems used on-board semiconductor OEM tools. GasShield Surface Mount Filters are for dimensions of two-port components for 1.125” and 1.5” four fastener surface mount gas distribution systems with C-seal and W-seal configurations and are compatible with all inert gases and most specialty gases.
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Literature & Data Sheets
Typical Applications
For use with W-seal and C-seal, 1.125” and 1.5” surface mount modular gas delivery systems.
Mott Semiconductor Products Catalog
Mott Filter and Flow Control Products for the Semiconductor Industry Products: High Purity Filters, Diffusers, and Flow Restrictors
Product Specs
| Operating Conditions |
» Maximum Operating Pressure: 1800 psig (124.1 barg) » Maximum Operating Temperature for Inert Gas: 460°C » Maximum Differential Pressure: 500 psid (34.4 bar) |
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| Materials |
» Hardware: 316LSS or Hastelloy C-22 » Filter Medium: Penta® Nickel, 316L SS or Hastelloy® C-22 » Wetted Hardware Surface Finish: 5 Ra, Electro-polished » Custom materials also available |
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| Specifications |
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| Flow Data |
More flow curves available, consult factory or spec sheets. |
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| Fittings & Dimensions |
GSMM-75 C-seal for 1.125”
GSMM-60 C-seal for 1.500”
GSMM-55 W-Seal for 1.125”
GSMM-50 W-seal for 1.500”
*Custom designs and fittings available. |
Videos & Articles
Our Design Capabilities
- Flow/pressure drop curves and filtration efficiency for virtually any system design
- Gas compatibility considerations
- Custom filter media, pressure vessel, and fitting material and configurations available
Relevant Services
Design Expertise – From start to finish, we customize solutions based on your design parameters – challenge us!
Fluid Modeling – Our extensive applications have built a library of data to increase the accuracy of our flow models to provide initial performance and feasibility estimates prior to building prototypes.
Extensive Partner Network – If a material is not listed or capability not in-house, we maintain an extensive network of partners for new material procurement, advanced manufacturing capabilities, and validation testing.
Engineering Support – Utilize our expert engineers to consult about your process and select the right surface mount filter for your application.
