GasShield® Surface Mount Filters
Mott GasShield® Surface Mount Filters provide industry-leading 0.0015 μm filtration for integrated gas systems used in semiconductor OEM tools. GasShield Surface Mount Filters accommodate dimensions of two-port components for 1.125” and 1.5” four-fastener, surface-mount gas distribution systems with C-seal and W-seal configurations and are compatible with all inert gases and most specialty gases.
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Literature & Data Sheets
Typical Applications
For use with W-seal and C-seal, 1.125” and 1.5” surface mount modular gas delivery systems.
Mott Semiconductor Products Catalog
Explore Mott’s wide range of high purity filters, diffusers and flow restrictors designed exclusively for semiconductor manufacturers.
Product Specs
| Operating Conditions |
» Maximum Operating Pressure: 1800 psig (124.1 barg) » Maximum Operating Temperature for Inert Gas: 460°C » Maximum Differential Pressure: 500 psid (34.4 bar) |
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| Materials |
» Hardware: 316LSS or Alloy 22* » Filter Medium: Penta® Nickel, 316L SS or Alloy 22* » Wetted Hardware Surface Finish: 5 Ra » Custom materials also available *Alloy 22 or UNS N06022 is a nickel-chromium-molybdenum super-alloy commonly referred to as Hastelloy® C-22® |
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| Specifications |
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| Flow Data |
More flow curves available, consult factory or spec sheets. |
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| Fittings & Dimensions |
GSMM-75 C-seal for 1.125”
GSMM-60 C-seal for 1.500”
GSMM-55 W-Seal for 1.125”
GSMM-50 W-seal for 1.500”
*Custom designs and fittings available. |
Videos & Articles
Our Design Capabilities
- Flow/pressure drop curves and filtration efficiency for virtually any system design
- Gas compatibility considerations
- Custom filter media, pressure vessel, and fitting material and configurations available
Relevant Services
Design Expertise – From start to finish, we customize solutions based on your design parameters – challenge us!
Fluid Modeling – Our extensive applications have built a library of data to increase the accuracy of our flow models to provide initial performance and feasibility estimates prior to building prototypes.
Extensive Partner Network – If a material is not listed or capability not in-house, we maintain an extensive network of partners for new material procurement, advanced manufacturing capabilities, and validation testing.
Engineering Support – Utilize our expert engineers to design the right surface mount filter for your application.
