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GasShield® Surface Mount Filters

Mott GasShield® Surface Mount Filters provide industry leading 0.0015 μm filtration for integrated gas systems used on-board semiconductor OEM tools. GasShield Surface Mount Filters are for dimensions of two-port components for 1.125” and 1.5” four fastener surface mount gas distribution systems with C-seal and W-seal configurations and are compatible with all inert gases and most specialty gases.

Information Request

Have a question? Can’t find what you’re looking for? Call us at 860.747.6333, or submit an information request form and someone will get back to you within 48 hours.

Literature & Data Sheets

Typical Applications

For use with W-seal and C-seal, 1.125” and 1.5” surface mount modular gas delivery systems.

Mott Semiconductor Products Catalog

Mott Filter and Flow Control Products for the Semiconductor Industry Products: High Purity Filters, Diffusers, and Flow Restrictors

Product Specs

Operating Conditions

» Maximum Operating Pressure: 1800 psig (124.1 barg)

» Maximum Operating Temperature for Inert Gas: 460°C

» Maximum Differential Pressure: 500 psid (34.4 bar)

Materials

» Hardware: 316LSS or Hastelloy C-22

» Filter Medium: Penta® Nickel, 316L SS or Hastelloy® C-22

» Wetted Hardware Surface Finish: 5 Ra, Electro-polished

» Custom materials also available

Specifications
Particle Removal Size: ≥ 0.0015 μm
Helium Leak Rating: 1 x 10-9 atm cc/sec
Moisture Contribution: <10 ppb after 1 hour at low-flow ambient purge per SEMI F27 test method
Total Hydrocarbons: Below detectable limits per SEMASPEC 90120396B test method
Particle Shedding: Zero particle contribution above background (<1 particle/ft³) per SEMI F43-0308 test method
Flow Data

More flow curves available, consult factory or spec sheets.

Fittings & Dimensions

GSMM-75 C-seal for 1.125”

Part Description Fitting Type Filter Material Housing Material Filter Design Flow Rating (SLPM) Overall Height (Inches)
GSMM-75-020-12
GSMM-75-030-12
GSMM-75-050-12
C-seal Nickel 316L SS 1.125” 20-50 1.6-4.0
GSMM-75-010-11
GSMM-75-030-11
C-seal 316L SS 316L SS 1.125” 10-30 2.4-4.0
GSMM-75-010-33
GSMM-75-030-33
C-seal Hastelloy®
C-22
Hastelloy
C-22
1.125” 10-30 2.4-4.9

 

GSMM-60 C-seal for 1.500”

Part Description Fitting Type Filter Material Housing Material Filter Design Flow Rating (SLPM) Overall Height (Inches)
GSMM-60-010-12
GSMM-60-050-12
GSMM-60-100-12
C-seal Nickel 316L SS 1.500” 10-100 1.3-4.5
GSMM-60-010-11
GSMM-60-020-11
GSMM-60-075-11
C-seal 316L SS 316L SS 1.500” 10-75 2.2-5.8
GSMM-60-010-33
GSMM-60-020-33
GSMM-60-075-33
C-seal Hastelloy
C-22
Hastelloy
C-22
1.500” 10-75 2.4-6.1

 

GSMM-55 W-Seal for 1.125”

Part Description Fitting Type Filter Material Housing Material Filter Design Flow Rating (SLPM) Overall Height (Inches)
GSMM-55-020-12
GSMM-55-030-12
GSMM-55-050-12
W-seal Nickel 316L SS 1.125” 20-50 1.7-4.2
GSMM-55-010-11
GSMM-55-030-11
GSMM-55-050-11
C-seal 316L SS 316L SS 1.125” 10-50 2.6-4.0
GSMM-60-010-33
GSMM-60-020-33
GSMM-60-075-33
C-seal Hastelloy
C-22
Hastelloy
C-22
1.125” 10-30 2.5-5.0

 

GSMM-50 W-seal for 1.500”

Part Description Fitting Type Filter Material Housing Material Filter Design Flow Rating (SLPM) Overall Height (Inches)
GSMM-50-010-12
GSMM-50-050-12
GSMM-50-100-12
W-seal Nickel 316L SS 1.500” 10-100 1.3-4.5
GSMM-50-010-11
GSMM-50-020-11
GSMM-50-030-11
GSMM-50-075-11
W-seal 316L SS 316L SS 1.500” 10-75 2.2-5.8
GSMM-50-010-33
GSMM-50-020-33
GSMM-50-075-33
C-seal Hastelloy
C-22
Hastelloy
C-22
1.500” 10-75 2.2-6.1

*Custom designs and fittings available.

Our Design Capabilities

  • Flow/pressure drop curves and filtration efficiency for virtually any system design
  • Gas compatibility considerations
  • Custom filter media, pressure vessel, and fitting material and configurations available

Relevant Services

Design Expertise – From start to finish, we customize solutions based on your design parameters – challenge us!

Fluid Modeling – Our extensive applications have built a library of data to increase the accuracy of our flow models to provide initial performance and feasibility estimates prior to building prototypes.

Extensive Partner Network – If a material is not listed or capability not in-house, we maintain an extensive network of partners for new material procurement, advanced manufacturing capabilities, and validation testing.

Engineering Support – Utilize our expert engineers to consult about your process and select the right surface mount filter for your application.