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High Purity Flow Restrictors

The Mott GSMR Series flow restrictors support the 1.125” high-flow C-Seal configuration gas systems. These restrictors are assembled and tested in a Class 100 clean room environment, and are mounted between the substrate and another two-port surface mount component.

The Mott VCR® fitting gas flow restrictor provides a compact, long-lasting flow control which can withstand sustained temperatures to 450°C (inert gas) and pressures to 120 psig.  Mott can supply restrictors that withstand pressures up to 1500 psig by request.

Custom materials, porosity and hardware configurations available upon request.

Information Request

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Literature & Data Sheets

Typical Applications

Semiconductor Products Catalog

Overview of products for the semiconductor industry.

High Purity Gas Flow Restrictors

Calibrated Gas Flow Restrictors, 316L Stainless Steel, Hastelloy® or Nickel media, 1/4" or 1/2" Face Seal Union, custom designs available

Surface Mount Restrictors

Overview of surface mount restrictor offering.

Product Specs

Operating Conditions

Surface Mount Restrictors

» Maximum Operating Temperature for Inert Gas: 460°C

» Maximum Operating Pressure: 1,200 psig

» Maximum Differential Pressure: 1,200 psid

» Burst Pressure: 20,000 psig

» Std Downstream Flow Rates: From 50 slpm (higher flows available)

» Flow tolerance: +/- 7% of rated flow at rated pressure (+/- 2% available upon request)

VCR Restrictors

» Maximum Operating Temperature for Inert Gas: 460°C

» Maximum Operating Pressure: 1,500 psig

» Maximum Differential Pressure: 1,500 psid

» Burst Pressure: 7,000 psig

» Std Downstream Flow Rates: From 50 slpm (higher flows available)

» Flow tolerance: +/- 7% of rated flow at rated pressure (+/- 2% available upon request)

Materials

» Housing: 316LSS

» Filter Medium: 316L SS

» Wetted Hardware Surface Finish: 10 Ra, Electro-polished

Fittings & Dimensions for Modular Mount Restrictor
Part Description Seal Type Restrictor Size

(Square In.)

Design Type Number of Ports Available Port Location Available
GSMR-20 C-seal 1.125 Spool piece 2-3 Side

Center

GSMR-30 C-seal 1.500 Spool piece 2-3 Side

Center

Fittings & Dimensions for VCR® Restrictors
Product Family Fitting Size Housing Material Porous Media Internal Surface Finish Length
5140 1/4″ VCR® Stainless Steel 316L SS 10 Ra 1.55″ / 39.4 mm

Our Design Capabilities

In order to design your surface mount flow restrictor, we need to know:

  • The process gas being used
  • Flow rate: sccm
  • Inlet pressure: psig
  • Outlet pressure, if other than atmosphere

Mott GSMR restrictors are calibrated on the following gases: Argon, Nitrogen, Hydrogen, Oxygen, Helium, and Air. All other gases are calibrated using viscosity curves.

Relevant Services

Engineering Support – Utilize our expert project engineers to consult your process and design the right filter elements to maximize flow and particle capture.