GasShield® Gasket Filters

Mott GasShield® Gasket Filters are built to withstand extreme operating conditions and deliver optimum filtration performance. GasShield Gasket Filters allow integration of a filter without adding length to the gas system and are compatible with most inert and specialty gases, fit inside 1/4 ” face seal fittings, with either 1” or 3” long porous elements, and come complete with integral face seal gasket.

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Literature & Data Sheets

GasShield Gasket Filters Overview

Nickel and stainless steel gasket filter specifications

Mott Semiconductor Products Catalog

Explore Mott’s wide range of high purity filters, diffusers and flow restrictors designed exclusively for semiconductor manufacturers.

Gasket Filter Installation and Replacement Instructions

Gasket Filter basic installation and replacement instructions

Product Specs

Operating Conditions

» Maximum Operating Temperature for Inert Gas: 450°C

» Maximum Differential Pressure: 1000 psid Forward or Reverse (68.9 barg)


» Hardware: 316LSS or Nickel

» Filter Medium: 316L SS or Nickel

» Hastelloy or custom materials contact us

Particle Removal Size: ≥ 0.003 μm
Helium Leak Rating: 1 x 10-9 atm cc/sec
Moisture Contribution: <10 ppb after 1 hour at low-flow ambient purge per SEMI F27 test method
Total Hydrocarbons: Below detectable limits per SEMASPEC 90120396B test method
Particle Shedding: Zero particle contribution above background (<1 particle/ft³) per SEMI F43-0308 test method
Flow Data

More flow curves available, consult factory or spec sheets.

Fittings & Dimensions

Typical Installation

Part Description Flow Rating (SLPM) Filter Material Face Seal Gasket Size (Inches) Element Length (Inches) Changeout Interval
GSG-V4-1-N 1 Nickel ¼ 1 System Dependent
GSG-V4-3-N 3 Nickel ¼ 3 System Dependent
20 Nickel ¼ 1 System Dependent
GSG-V5-1-2N 50 Nickel ½ 1 System Dependent
GSG-V4-1-S 1 316L SS ¼ 1 System Dependent
GSG-V4-3-S 3 316L SS ¼ 3 System Dependent
GSG-V4-1-2S 20 316L SS ¼ 1 System Dependent
GSG-V5-1-2S 50 316L SS ½ 1 System Dependent

*Custom designs and fittings available.

Our Design Capabilities

  • Flow/pressure drop curves and filtration efficiency for virtually any system design
  • Gas compatibility considerations
  • Custom filter media, fitting material and hardware design configurations available

Relevant Services

Design Expertise – From start to finish, we customize solutions based on your design parameters – challenge us!

Fluid Modeling – Our extensive applications have built a library of data to increase the accuracy of our flow models to provide initial performance and feasibility estimates prior to building prototypes.

Extensive Partner Network – If a material is not listed or capability not in-house, we maintain an extensive network of partners for new material procurement, advanced manufacturing capabilities, and validation testing.

Engineering Support – Utilize our expert project engineers to select the right gasket filter for your application.