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Technical Resource Downloads

Check out the information about our products and applications. If you don’t find what you’re looking for, do a quick search or feel free to email us directly. You may need to disable pop-up blocker to view certain PDF files.

POU-015-S GasShield® Point of Use Filters

Part Number: 6800049, 6800029, 6800121 Stainless Steel Filter Media and Housing point of use filter for flow ranges 10-30 SLPM, […]

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POU-05-FSV1 GasShield® Fiber POU Gas Filters

Part Number: 6700015 316L Stainless Steel Fiber Filter Media and 316L SS VAR Housing point of use filter for flow […]

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POU-05-NS GasShield® Point of Use Filters

Part Number: 6800052, 6800070 Nickel Filter Media and 316L stainless steel Housing point of use filter for flow range up […]

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POU-05-S GasShield® Point of Use Filters

Part Number: 6800017, 6800059 Stainless Steel Filter Media and Housing point of use filter for flow ranges up to 10 […]

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POU-10-H GasShield® Point of Use Filters

Part Number: 6800004, 6800178 Alloy 22 Filter Media and Housing point of use filter for flow ranges 60-150 SLPM, OAL […]

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POU-10-HS GasShield® Point of Use Filters

Part Number: 6800046, 6800181 Alloy 22 Filter Media and 316L stainless steel Housing point of use filter for flow ranges […]

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POU-10-S GasShield® Point of Use Filters

Part Number: 6800003, 6800007, 6800011, 6800073 Stainless Steel Filter Media and Housing point of use filter for flow ranges 60-150 […]

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POU-3-H GasShield® Point of Use Filters

Part Number: 6800002, 6800148 Alloy 22 Filter Media and Housing point of use filter for flow ranges 30-60 SLPM, OAL […]

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POU-3-HS GasShield® Point of Use Filters

Part Number: 6800045, 6800180 Stainless Steel Housing and Alloy 22 Filter Media point of use filter for flow ranges 30-60 […]

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POU-3-NS GasShield® Point of Use Filters

Part Number: 6800067 Nickel Filter Media and 316L stainless steel Housing point of use filter for flow ranges 30-60 SLPM, […]

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POU-3-S GasShield® Point of Use Filters

Part Number: 6800001, 6800079 Stainless Steel Filter Media and Housing point of use filter for flow ranges 30-60 SLPM, OAL […]

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POU-30-S GasShield® Point of Use Filters

Part Number: 6800074, 6800140 Stainless Steel Filter Media and Housing point of use filter for flow ranges 200-300 SLPM, OAL […]

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Ultra High Purity Porous Ceramics

Mott’s Ultra High Purity Porous Ceramics can be customized to your application requirements.  Excellent for CVD process, ion implant and […]

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Sentry Series Penta® Nickel POU Gas Filters

Part Number: 6815001, 6815004, 6805005 Penta® Nickel Filter Media and 316L Stainless Steel Hardware

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Static Flow Controller

Part Number: 5400 and 5410 Series 316L Stainless Steel Media and Hardware, Flow Ranges 1 sccm to 40 slpm, +/-1% […]

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A Low Pressure Drop Sintered Metal Filter for Ultra-High Purity Gas Systems

Whitepaper on all-metal filter with improved performance over other POU gas filters used in semiconductor fabrication.

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Weld Gas Purge Jumper Particle Filters

SEMI Standards for welding and weld gas purge jumper particle filters. Using a fiber metal filter provides the fastest and […]

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POU-05-H GasShield® Point of Use Gas Filters

Part Number: 6800040 Alloy 22 Filter Media and Housing Hardware point of use filter for flow ranges up to 10 […]

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