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Mott Point-of-Use Filter Installation and Use Guide
Mott GasShield® Point-of-Use Filter Instructions and Use Guide
POU-015-S GasShield® Point of Use Filters
Part Number: 6800049, 6800029, 6800121 Stainless Steel Filter Media and Housing point of use filter for flow ranges 10-30 SLPM, […]
POU-05-FSV1 GasShield® Fiber POU Gas Filters
Part Number: 6700015 316L Stainless Steel Fiber Filter Media and 316L SS VAR Housing point of use filter for flow […]
POU-05-NS GasShield® Point of Use Filters
Part Number: 6800052, 6800070 Nickel Filter Media and 316L stainless steel Housing point of use filter for flow range up […]
POU-05-S GasShield® Point of Use Filters
Part Number: 6800017, 6800059 Stainless Steel Filter Media and Housing point of use filter for flow ranges up to 10 […]
POU-10-H GasShield® Point of Use Filters
Part Number: 6800004, 6800178 Alloy 22 Filter Media and Housing point of use filter for flow ranges 60-150 SLPM, OAL […]
POU-10-HS GasShield® Point of Use Filters
Part Number: 6800046, 6800181 Alloy 22 Filter Media and 316L stainless steel Housing point of use filter for flow ranges […]
POU-10-S GasShield® Point of Use Filters
Part Number: 6800003, 6800007, 6800011, 6800073 Stainless Steel Filter Media and Housing point of use filter for flow ranges 60-150 […]
POU-3-H GasShield® Point of Use Filters
Part Number: 6800002, 6800148 Alloy 22 Filter Media and Housing point of use filter for flow ranges 30-60 SLPM, OAL […]
POU-3-HS GasShield® Point of Use Filters
Part Number: 6800045, 6800180 Stainless Steel Housing and Alloy 22 Filter Media point of use filter for flow ranges 30-60 […]
POU-3-NS GasShield® Point of Use Filters
Part Number: 6800067 Nickel Filter Media and 316L stainless steel Housing point of use filter for flow ranges 30-60 SLPM, […]
POU-3-S GasShield® Point of Use Filters
Part Number: 6800001, 6800079 Stainless Steel Filter Media and Housing point of use filter for flow ranges 30-60 SLPM, OAL […]
POU-30-S GasShield® Point of Use Filters
Part Number: 6800074, 6800140 Stainless Steel Filter Media and Housing point of use filter for flow ranges 200-300 SLPM, OAL […]
Sentry Series Penta® Nickel POU Gas Filters
Part Number: 6815001, 6815004, 6805005 Penta® Nickel Filter Media and 316L Stainless Steel Hardware
A Low Pressure Drop Sintered Metal Filter for Ultra-High Purity Gas Systems
Whitepaper on all-metal filter with improved performance over other POU gas filters used in semiconductor fabrication.
Weld Gas Purge Jumper Particle Filters
SEMI Standards for welding and weld gas purge jumper particle filters. Using a fiber metal filter provides the fastest and […]
POU-05-H GasShield® Point of Use Gas Filters
Part Number: 6800040 Alloy 22 Filter Media and Housing Hardware point of use filter for flow ranges up to 10 […]
BGF315H GasShield® Penta® Bulk Gas Filter
Part Number: 6825164 Penta® Nickel Filter Media and 316L stainless steel Housing bulk gas filter for flow ranges up to […]