Technical Resource Downloads

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High Purity Gas Metal Compatibility Chart

A guideline for appropriate metal media (316L Stainless Steel, Nickel, Alloy 22 (aka Hastelloy® C-22) and gas compatibility. Consultation with […]

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Mott Semiconductor Catalog

Mott Filter and Flow Control Products for the Semiconductor Industry Products: High Purity Filters, Diffusers, and Flow Restrictors

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High Purity Gas Flow Restrictors

Part Number: 5140 Series Calibrated Gas Flow Restrictors, 316L Stainless Steel, Hastelloy® or Nickel media, 1/4″ or 1/2″ Face Seal […]

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BGF12P23 GasShield Fiber Bulk Gas Filter Models

Part Numbers: 6825182,  6825183, 6825185, 6825320, 6825328, 6825329 316L Stainless Steel Fiber Filter Media and 316L stainless steel Housing bulk […]

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BGF12P23 GasShield Fiber Bulk Gas Filter

Part Numbers: 6825182 & 6825335 316L Stainless Steel Fiber Filter Media and 316L stainless steel Housing bulk gas filter for […]

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BGF310 GasShield® Penta® Bulk Gas Filters

Part Number: 6825121, 6825120, 6825116 Penta® Nickel Filter Media and 316L stainless steel Housing bulk gas filter for flow ranges […]

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BGF315 GasShield® Penta® Bulk Gas Filters

Part Number: 6825122, 6825123 Penta® Nickel Filter Media and 316L stainless steel Housing bulk gas filter for flow ranges up […]

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BGF-315H-40A5S-N-15M GasShield® Penta® Bulk Gas Filter

Part Number: 6825156 Penta® Nickel Filter Media and 316L stainless steel Housing bulk gas filter for flow ranges up to […]

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BGF610 GasShield® Penta® Bulk Gas Filters

Part Number: 6825311, 6825312, 6825313, 6825314 Penta® Nickel Filter Media and 316L stainless steel Housing bulk gas filter for flow […]

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BGF-610H-4TS-N-30M GasShield® Penta® Bulk Gas Filter

Part Number: 6825157 Penta® Nickel Filter Media and 316L stainless steel Housing bulk gas filter for flow ranges up to […]

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BGF615 GasShield® Penta® Bulk Gas Filters

Part Number: 6825088, 6825124, 6825125 Penta® Nickel Filter Media and 316L stainless steel Housing bulk gas filter for flow ranges […]

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BGF615H GasShield® Penta® Bulk Gas Filters

Part Number: 6825146, 6825147, 6825148 Penta® Nickel Filter Media and 316L stainless steel Housing bulk gas filter for flow ranges […]

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BGF615HF GasShield® Penta® Bulk Gas Filters

Part Number: 6825149, 6825150, 6825151 Penta® Nickel Filter Media and 316L stainless steel Housing bulk gas filter for flow ranges […]

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Mott Bulk Gas Filter Considerations

Mott Bulk Gas Filter Considerations for Installation and Operation

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Ceramic Flow Components for ESCs

IMPROVE YOUR PROCESS TOOL PRODUCTIVITY WITH EXTENDED ELECTROSTATIC CHUCK LIFETIME AND BETTER FULL WAFER TEMPERATURE UNIFORMITY

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GasShield® Defender Gas Filters

Part Number: 6700001, 6700010, 6700007 316L Stainless Steel Fiber Filter Media and 316L stainless steel Housing point of use filter […]

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DEF315H GasShield® Defender High Flow Gas Filters

Part Number: 6712201 316L Stainless Steel Fiber Filter Media and 316L stainless steel Housing point of use filter for flow […]

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DEF331 GasShield® Defender Gas Filters

Part Number: 6700001, 6700003 316L Stainless Steel Fiber Filter Media and 316L stainless steel Housing point of use filter for […]

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