GasShield® HiFlow™ Sandwich Filter

Ultra-Compact, High-Purity Filtration for ALD and Advanced Materials Processes

The GasShield® HiFlow™ Sandwich Filter is the industry’s first point-of-use metal fiber filter engineered for ultra-high purity (UHP) gas delivery in advanced semiconductor processes. This compact, patent-pending design tackles the most demanding requirements of Atomic Layer Deposition (ALD) and More-than-Moore device architectures with superior efficiency and reliability.

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Problems Solved by Mott’s Sandwich Filter:

Pressure Drop vs. Throughput: Traditional filters restrict flow — Mott’s design delivers 25% lower pressure drop, improving throughput without sacrificing performance.
Particle Capture vs. Placement: Most filters miss particles where it counts — Mott provides >9 LRV retention down to 1.5nm right at the chamber, minimizing defects.
Performance vs. Footprint: High-performance filters are often too bulky — Mott’s compact sandwich-style design fits in tight spaces without compromise.

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GasShield® HiFlow™ Sandwich Filter Cut Sheet | Mott Corporation

Download the cut sheet for Mott’s GasShield® HiFlow™ Sandwich Filter—compact design, >9 LRV at 1.5nm, and low pressure drop for ALD and UHP gas delivery.

High Purity Surface Mount Flow Restrictors

The Mott GSMR Series flow restrictors support the 1.125” high-flow C-Seal configuration gas systems.

Product Specs

Product Features

>9 LRV Filtration Efficiency
Filters particles as small as 1.5 nm, ensuring critical protection at the point of use.

Ultra-Compact Design
Optimized for tight spaces—1.12” x 1.12” x 0.49” form factor integrates seamlessly into OEM gas boxes and tool layouts.

Lower Pressure Drop
Up to 35% reduction in pressure drop compared to traditional disc filters using proprietary Alloy C-22 fiber media.

All-Metal Construction
Built from 316L stainless steel or Alloy 22, with electro-polished UHP surfaces to eliminate shedding and outgassing.

Exceptional Thermal Stability
Rated for use up to 460°C, ensuring reliability in high-temperature environments.

Applications

ALD precursor filtration
Gas cabinets & sticks
Valve manifold boxes
OEM tool gas boxes
Tool isolation gas boxes

Performance Specifications

Attribute	Specification
Filtration Efficiency	>9 LRV at 1.5 nm (SEMI F38-0720)
Operating Pressure	>750 psig
Operating Temperature	Up to 460°C
Differential Pressure	Max 1000 psid
Leak Rate	1 × 10⁻⁹ atm cc/sec
Moisture Contribution	<10 ppb (SEMI F27)
Hydrocarbons	Below detectable limits
Particle Shedding	Zero contribution above background

Ordering Information

Part Number	Material	Fitting Type	Dimensions (W x L x H)
6700065	316L SS	C-Seal	1.12″ x 1.12″ x 0.49″
6700066	Alloy 22	C-Seal	1.12″ x 1.12″ x 0.49″

W-Seal and custom fittings available upon request.

Dimensions