GasShield® Point-of-Use Filters
For maximum gas filtration efficiency, reliability, and industry-leading flow consistency, GasShield® point of use filters are ideal for Ultra High Purity (UHP) gas delivery applications. These point of use filters are available in a variety of materials and are compatible with most high purity electronics grade process gases, ensuring optimal performance.
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Literature & Data Sheets
Typical Applications
Point-of-Use Filters are used in gas sticks for:
- Equipment hookup
- Valve manifold boxes
- Gas cabinets
- Tool isolation gas boxes
- On-board OEM tool gas boxes
Mott Semiconductor Catalog
Mott Filter and Flow Control Products for the Semiconductor Industry Products: High Purity Filters, Diffusers, and Flow Restrictors
Mott Point-of-Use Filter Instructions
Mott GasShield® POU Filters Installation and Use Instructions
Product Specs
| Operating Conditions |
» Maximum Operating Pressure: Up to 3750 psig (258 barg) » Maximum Operating Temperature for Inert Gas: 460°C » Maximum Differential Pressure: 1000 psid (68.9 bar) |
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| Materials |
» Hardware: Stainless Steel, Stainless Steel VAR, or Alloy 22* » Filter Medium: Stainless Steel, Nickel, Alloy 22*, or Stainless Steel Fiber » Wetted Hardware Surface Finish: 5 Ra for Stainless Steel or Hastelloy® Hardware » Custom Options Also Available *Alloy 22 or UNS N06022 is a nickel-chromium-molybdenum super-alloy commonly referred to as Hastelloy® C-22® |
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| Specifications |
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| Fittings & Dimensions |
*Custom designs and fittings available. |
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| Flow Curves |
Consult cutsheets or factory for filter flow curves. |
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Videos & Articles
Our Design Capabilities
- Flow/pressure drop curves and filtration efficiency for virtually any system design
- Gas compatibility considerations
- Custom filter media, pressure vessel, and fitting material, including point of use filter configurations, available
Relevant Services
Design Expertise – From start to finish, we specialize in customizing solutions based on your design parameters – challenge us to provide the right point of use filter solutions for your application.
Fluid Modeling – Our extensive applications have built a library of data to increase the accuracy of our flow models for point of use filters, providing initial performance and feasibility estimates prior to building prototypes.
Extensive Partner Network – If a material is not listed or capability not in-house, we maintain an extensive network of partners for new material procurement, advanced manufacturing capabilities, and validation testing for point of use filters.
Engineering Support – Count on our expert engineers to design or select the optimal point of use filter solutions tailored to your application’s specific needs.
