How Filtration is Powering the Next Wave of Semiconductor Innovation: Moly Metal, ALD, and the Rise of More-than-Moore
The semiconductor industry has long lived by Moore’s Law — the relentless march toward smaller, faster, more efficient devices. But we’re now well into a new era: More-than-Moore. While we’re still scaling down, just as important is the shift toward new materials, new architectures, and new ways of building the future of microelectronics.
One standout in this materials revolution? Molybdenum metal (Mo). And behind the scenes, filtration — yes, filtration — is playing a vital role in enabling this transformation.
Why Moly Metal Is Taking Center Stage
For decades, tungsten has been the go-to metal in semiconductor contacts and interconnects. But as we scale down to just a few nanometers, tungsten’s properties hit a wall. That’s where moly steps in.
Molybdenum offers:
- Lower resistivity at ultra-thin dimensions
- Better electromigration resistance
- Improved step coverage in tight geometries
It’s a game-changer for advanced nodes and 3D architectures.
But there’s a catch: Molybdenum is typically delivered via Atomic Layer Deposition (ALD) from solid precursors. These materials — often stored as powders — must be vaporized inside heated containers in the OEM tool, creating a delivery challenge. Why? These vapors have extremely low vapor pressure and are chemically aggressive.
The Filtration Challenge: Corrosive, Low-Pressure Vapors
To deliver moly precursors reliably and safely, fabs need filters that can:
- Withstand corrosive chemistries
- Operate under high temperature conditions
- Maintain ultra-high purity without shedding or outgassing
- Handle very low vapor pressures without significant pressure drop
Most legacy filtration solutions simply weren’t built for this. That’s where Mott’s GasShield® HiFlow™ Sandwich Filter comes in.
Engineered for Advanced Materials: Inside the HiFlow™ Sandwich Filter
Mott’s GasShield® HiFlow™ is the industry’s first point-of-use sandwich-style filter with sintered metal fiber media — and it’s built for exactly these kinds of demanding ALD and precursor delivery applications.
Key Specs:
- Particle retention >9 LRV at 1.5 nm (SEMI F38-0720)
- All-metal construction – no shedding, no outgassing
- Available in Alloy C-22, perfect for halogenated and corrosive vapors
- Rated to 460°C for high-temp inert gas or precursor delivery
- 25–35% lower pressure drop compared to traditional disc filters
- Zero particle contribution above background (SEMI F43-0308)
The filter’s compact form factor (just 1.12″ x 1.12″ x 0.49″) fits directly between a component and surface block, making it ideal for tight tool layouts, hot zones, and on-board OEM gas boxes.
Why This Matters for Engineers and Tool Designers
If you’re building or retrofitting gas delivery systems for advanced nodes, particularly those using moly deposition via ALD, this filter was built for you.
It gives you:
- Material compatibility for new precursors
- Stable, predictable flow rates (≤2% part-to-part variation)
- Long-term reliability — warranted for 5 years under standard use
- Plug-and-play integration in C-seal or custom W-seal configurations
And for engineers concerned with uptime, tool safety, and process control, that peace of mind is huge.
Conclusion: A Small Filter Making a Big Impact
More-than-Moore isn’t just a buzzword — it’s the foundation of how the industry is evolving. And Mott is helping fabs and OEMs meet that challenge head-on with filtration solutions that can handle the next generation of materials, including corrosive, ultra-low-vapor-pressure moly precursors.
In the race for better performance, higher yields, and cleaner processes, the details matter — and the GasShield® HiFlow™ Sandwich Filter is engineered with every one of those details in mind.
