Advanced Thermal Management in Semiconductor Tools: Improving Waste Heat Recovery and Mirror Deformation
By Karthik Viswanathan, Vice President & General Manager, Mott Corporation
Increased demand for data centers and artificial intelligence is driving incredible new semiconductor tool innovation. These new semiconductor tools require tremendous energy to achieve advanced processing nodes, and much of this energy is not managed effectively today. Ineffective thermal management in semiconductor tools has three critical impacts, which Mott’s advanced solutions are designed to address.
Lithography Mirror Deformation
Absorbed light causes thermal and structural changes in lithography mirrors, leading to deformation. This affects image quality and alignment accuracy, resulting in significant yield losses, a costly issue for semiconductor fabs.
Increased Energy Usage
Power consumption for new tools continues to rise. Future fabs will consume more power than many countries consume per year! Semiconductor fab owners face growing energy costs as they strive to optimize production while maintaining competitiveness in an energy-intensive industry.
Environmental Impact
As tool power consumption grows, much of the energy consumed to run these tools is lost to the environment and not recovered to power other process applications. This has a large impact on our environment as no single renewable source can power advanced FABs today.
Mott’s Advanced Thermal Management Solutions
To mitigate these challenges, Mott has pioneered cutting-edge thermal management techniques through rigorous testing and collaboration with industry leaders. These advanced solutions include:
- Two-Phase Cooling Additive Componentry: Provides precise temperature control to manage heat at the source.
- High-Surface Convection Stack Designs: Enhances heat dissipation for critical components.
- Selective Porosity Heat Transfer Designs: Embeds multi-density porous metal structures and micro-cooling channel plates into tool architecture for efficient energy recovery.
These innovative solutions not only prevent mirror deformation but also redirect waste heat for reuse in other applications, reducing energy costs and carbon footprints.
Take Action Today
Discover how Mott’s advanced thermal management solutions can help you reduce costs, enhance performance, and build a sustainable future. Contact us today to learn more.
