Ultra High Purity Gas Delivery Systems
Mott’s high-purity gas filters are ideal for gas delivery systems found in semiconductor fabs. These gas filters provide 9-log filtration of particles as small as 0.0015 µm to ensure particle-free gas and provide rapid dry down in minutes rather than hours. Mott’s bulk and point-of-use gas filters are available in stainless steel, Hastelloy, and Penta® Nickel ensuring compatibility with nearly all high-purity semiconductor process gases.
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Related Resources
Typical Applications:
- Gas Cabinet
- Valve Manifold Box
- Tool Isolation Box
- On-board Gas Delivery Box
- Atomic Layer Deposition (ALD)
Semiconductor Catalog
Explore Mott’s wide range of high purity filters, diffusers and flow restrictors designed exclusively for semiconductor manufacturers.
Mott GasShield Fiber Bulk Gas Filter 12P23 Models
Ultra High Purity Filtering of Process Inert Gases at Flow Rates up to 15,000 m3/Hr (250,000 slpm)
Lab and Engineering Services
Discover our entire range of services, including rapid prototyping, filter feasibility, media characterization and more.
What is a Ultra High Purity Gas Delivery System
An Ultra High Purity (UHP) Gas Delivery System is a specialized setup designed to transport and supply gases with the highest levels of purity to specific applications, such as semiconductor manufacturing. These systems, leveraging Mott’s expertise in high-purity gas delivery, incorporate advanced filtration and purification mechanisms to ensure that contaminants and impurities are effectively removed from the gas stream. The primary goal is to provide gases that meet stringent purity standards, ensuring optimal performance and product quality in critical applications. The system’s components, including Mott’s state-of-the-art filters and delivery lines, are often made of materials that prevent contamination and consistently maintain the gas’s purity.
FAQs: Ultra High Purity Gas Delivery Systems
Q: What is an Ultra High Purity Gas Delivery System?
A: An Ultra High Purity (UHP) Gas Delivery System is a specialized setup designed to transport and supply gases with the highest levels of purity to specific applications, such as semiconductor manufacturing. It ensures that gases meet stringent purity standards by effectively removing contaminants and impurities.
Q: Why is an Ultra High Purity Gas Delivery System essential for industries?
A: UHP Gas Delivery Systems are crucial for industries like semiconductor manufacturing, pharmaceuticals, and aerospace, where the slightest impurity can affect product quality, yield, and safety. These systems ensure optimal performance and product quality in critical applications.
Q: How does an Ultra High Purity Gas Delivery System work?
A: The system incorporates advanced filtration and purification mechanisms to remove contaminants and impurities from the gas stream. Components, including filters and delivery lines, are made of materials that prevent contamination, ensuring the gas remains at the desired purity level.
Q: What components are typically part of an Ultra High Purity Gas Delivery System?
A: The system usually comprises components like filters, purifiers, regulators, valves, and delivery lines. These components are often made of materials that resist contamination, ensuring the consistent purity of the delivered gas.
Q: How often does an Ultra High Purity Gas Delivery System need maintenance?
A: Maintenance frequency depends on the system’s usage, the type of gases processed, and the level of contaminants in the source gas. Regular inspections and timely maintenance are essential to ensure the system’s longevity and consistent gas purity.
Q: Can Ultra High Purity Gas Delivery Systems handle corrosive or flammable gases?
A: Yes, many UHP Gas Delivery Systems are designed to safely handle a variety of gases, including flammable, corrosive, and inert gases. It’s essential to choose a system specifically designed for the type of gas being used to ensure safety and performance.
