High Purity Porous Ceramics
Mott’s high-purity porous ceramics, including custom porous ceramics and alumina ceramics, are engineered with tunable porosity and pore size to meet specific dielectric breakdown, mechanical strength, and flow requirements. Our high-purity alumina (up to 99.999% pure) ceramic components for reduced contamination provide excellent heat resistance, electrical insulation, plasma resistance, and inertness in extreme environments.
Our high purity ceramic technology, including Mott ceramic plugs, can be tailored to meet your unique application requirements, leveraging both conventional and 3D printing capabilities. As a leader in innovative customization, our conventional porous ceramic materials can be crafted into various forms, from small porous ceramic tubes or bushings to discs, plates, or other form factors. For complex geometries, our 3D print process allows for precise accuracy and repeatability for critical features required in semiconductor device fabrication applications, such as plugs for electrostatic chucks (E-chuck ceramics).
Manufacturing these ultra high purity porous ceramics in a clean room environment with pure raw materials ensures unparalleled cleanliness. The inherent properties of ceramics such as high-temperature stability, impressive hardness, corrosion resistance, minimal thermal expansion, and a high melting point, make them ideal for components such as filters, flow plugs, insulators, substrates, and packaging in semiconductor and other high-purity applications.
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Literature & Data Sheets
Typical Applications
- Electrostatic Chuck Conduits and Feed Systems
- Ultra High Purity Gas Diffusion
- High Temperature Liquid Filtration
- Semiconductor Wafer Substrates
- CVD Equipment Parts
- Electronic Components and Substrates
- Gas Flow Plugs and Ports
Semiconductor Products Catalog
Explore Mott’s wide range of high purity filters, diffusers and flow restrictors designed exclusively for semiconductor manufacturers.
Product Specs
| Why Choose Mott? |
» 30+ years of experience delivering filters and flow control products for high-purity applications » Willingness to customize to meet your unique needs » Novel, patented porous and porous-solid hybrid products with industry-leading purity, dielectric » U.S. based supplier known for iron-clad reliability and world-class quality » Dedicated ceramic manufacturing cell in a cleanroom environment with both conventional and |
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| Specifications |
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| Geometries |
Sleeved Porous Plugs Small Tubes/Bushings Plates Discs |
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| Contact Us! |
Talk to us about your custom material (alumina, zirconia, silicon nitride, tricalcium phosphate, hydroxyl apatite, aluminum oxide, etc) and design needs. We’d love to work with you on your next ceramic project. |
Our Design Capabilities
- Flow/pressure drop curves and filtration efficiency for virtually any design
- Gas compatibility considerations
- Custom filter media, pressure vessel, and fitting material and configurations available
Relevant Services for Porous Ceramics and High Purity Ceramic Solutions
Design Expertise – From conceptualization to completion, we customize high purity ceramic solutions based on your design parameters. Embracing challenges, our dedicated team is committed to crafting the best porous ceramics without compromising on quality, no matter the complexity of the task.
Lab Testing – Should you require data packages or feasibility testing for your porous ceramic components before installation, we’re at your service. Our lab center conducts comprehensive characterization and performance tests, ensuring your parts meet stringent specifications. This rigorous testing elucidates the precise capabilities and potential limitations of the products, preventing costly damages from overexertion or undue stress.
Engineering Support – Engage with our project engineers to delve deep into your process requirements and choose the right porous ceramic or electrostatic chuck design tailored to your application. With a myriad of customization options for our ceramic products, our expert engineers are dedicated to ensuring that what you receive is perfectly aligned with your specific needs.
Top Tier Products
At Mott, we are proud to supply high-quality products that have been implemented across several industries for decades. Our high purity porous ceramics are rated highly in several areas, ensuring they will stand up to the demands that your machinery requires. We also can develop additional geometries of our ultra high purity porous ceramics. Mott sales representatives are happy to have a conservation with you to determine if our capabilities align with your needs!
FAQs: Ultra High Purity Porous Ceramics
Q: What are the unique features of Mott’s ultra high purity porous ceramics?
A: Mott’s ultra-high purity porous ceramics are customizable to specific application requirements. They offer a wide range of chemical compatibilities and are durable in high temperature, high voltage, and/or high pressure environments. These ceramics are especially suitable for applications requiring the highest purity standards.
Q: In what forms can Mott’s porous ceramics be manufactured?
A: Mott’s porous ceramics exhibit high geometric flexibility. They can be crafted into various shapes such as small tubes, bushings, discs, or sleeved plugs, catering to diverse application needs. Mott is currently developing 3D printing of ceramic parts to fabricate complex geometries to include precise porosity where needed.
Q: What are the primary benefits of using porous alumina in high purity ceramic applications?
A: Porous alumina, or aluminum oxide Al2O3, offers outstanding mechanical strength, wear resistance, and resistance to corrosive environments. Its high stability at elevated temperatures, impressive hardness, excellent corrosion resistance, low thermal expansion coefficient, and high melting point make it valuable across many industries, especially in semiconductor processes.
Q: Can Mott’s porous ceramics be used in electrostatic chuck applications?
A: Mott can provide critical components of an electrostatic chuck to extend its useful life and improve its thermal management performance. For example, our advanced porous ceramic plugs are crafted from high purity alumina with meticulously engineered pore sizes, enabling reliable and uniform cooling gas flow. Their inherent high voltage breakdown strength allows them to operate for extended periods without arcing events, thereby enhancing the productivity of the overall semiconductor tool. With this reduced risk of arcing events that typically cause yield-limiting debris combined with a more uniform backside cooling, you can now maximize the performance of your process chamber through enhanced process control and more predictable maintenance schedules.
Q: What makes porous alumina a preferred material for high purity ceramic applications?
A: Porous alumina, also known as aluminum oxide (Al2O3), is a ceramic material renowned for its exceptional mechanical strength, wear resistance, and resilience in corrosive environments. Its properties, such as high temperature stability, hardness, corrosion resistance, low thermal expansion coefficient, and a high melting point, make it invaluable for various industries. Mott’s high purity porous alumina ceramics are manufactured with up to 99.999% pure alumina, ensuring optimal performance and purity for critical applications.
