GasShield® Point-of-Use Filters
For maximum gas filtration efficiency, reliability, and industry-leading flow consistency, GasShield® Point-of-Use Filters are ideal for Ultra High Purity (UHP) gas delivery applications. Point-of-Use Filters are available in a variety of materials and compatible with most high purity electronics grade process gases.
Literature & Data Sheets
Point-of-Use Filters are used in gas sticks for:
- Equipment hookup
- Valve manifold boxes
- Gas cabinets
- Tool isolation gas boxes
- On-board OEM tool gas boxes
» Maximum Operating Pressure: Up to 3750 psig (258 barg)
» Maximum Operating Temperature for Inert Gas: 460°C
» Maximum Differential Pressure: 1000 psid (68.9 bar)
» Hardware: Stainless Steel, Stainless Steel VAR, or Hastelloy® C-22
» Filter Medium: Stainless Steel, Nickel, Hastelloy® C-22, or Stainless Steel Fiber
» Wetted Hardware Surface Finish: 5 Ra Electro-polished for Stainless Steel Hardware, 5 Ra for Hastelloy® Hardware
» Custom Options Also Available
|Fittings & Dimensions||
*Custom designs and fittings available.
Consult cutsheets or factory for filter flow curves.
Videos & Articles
Our Design Capabilities
- Flow/pressure drop curves and filtration efficiency for virtually any system design
- Gas compatibility considerations
- Custom filter media, pressure vessel, and fitting material and configurations available
Design Expertise – From start to finish, we customize solutions based on your design parameters – challenge us!
Fluid Modeling – Our extensive applications have built a library of data to increase the accuracy of our flow models to provide initial performance and feasibility estimates prior to building prototypes.
Extensive Partner Network – If a material is not listed or capability not in-house, we maintain an extensive network of partners for new material procurement, advanced manufacturing capabilities, and validation testing.
Engineering Support – Utilize our expert engineers to consult your process and choose the right point of use filters for your application.
- Product Overview
- Literature & Data Sheets
- Product Specs
- Videos & Articles
- Design Capabilities
- Relevant Services