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GasShield® Point-of-Use Filters

For maximum gas filtration efficiency, reliability, and industry-leading flow consistency, GasShield® Point-of-Use Filters are ideal for Ultra High Purity (UHP) gas delivery applications. Point-of-Use Filters are available in a variety of materials and are compatible with most high purity electronics grade process gases.

Information Request

Call us at 860.747.6333, or submit an information request form and someone will get back to you within 48 hours.

Product Specs

Operating Conditions

» Maximum Operating Pressure: Up to 3750 psig (258 barg)

» Maximum Operating Temperature for Inert Gas: 460°C

» Maximum Differential Pressure: 1000 psid (68.9 bar)

Materials

» Hardware: Stainless Steel, Stainless Steel VAR, or Hastelloy® C-22

» Filter Medium: Stainless Steel, Nickel, Hastelloy® C-22, or Stainless Steel Fiber

» Wetted Hardware Surface Finish: 5 Ra Electro-polished for Stainless Steel Hardware, 5 Ra for Hastelloy® Hardware

» Custom Options Also Available

Specifications
Particle Removal Size: ≥ 0.0015 μm
Filter Efficiency (Log Reduction Value): 9 LRV (99.9999999% reduction in particles).

Confirmed at the most penetrating particle size of 0.08 μm per SEMI F38-0699 test method

Helium Leak Rating: 1 x 10-9 atm cc/sec
Moisture Contribution: <10 ppb after 1 hour at low-flow ambient purge per SEMI F27 test method
Total Hydrocarbons: Below detectable limits per SEMASPEC 90120396B test method
Particle Shedding: Zero particle contribution above background (<1 particle/ft³) per SEMI F43-0308 test method
Fittings & Dimensions
POU-03

Part Description Fitting Type A in/mm B in/mm C in/mm
POU-3-SV1

POU-3-HV1

POU-3-HSV1

POU-3-NSV1

¼ in. Male/Male Face Seal 3.31/84.0 1.50/38.1 1.062/26.9
POU-3-SV3

POU-3-HV3

POU-3-HSV3

½ in. Male/Male Face Seal 3.31/84.0 1.50/38.1 1.062/26.9
POU-05

Part Description Fitting Type A in/mm B in/mm C in/mm
POU-05-SV1

POU-05-HV1

POU-05-NSV1

¼ in. Male/Male Face Seal 3.31/84.0 0.75/19.0 0.812/20.6
POU-05-ST1

POU-05-NST1

¼ in. Butt Weld Tube Stubs 3.31/84.0 0.75/19.0 N/A
POU-05-FSV1 ¼ in. Male/Male Face Seal 3.31/84.0 0.75/19.0 0.625/15.9
POU-10

Part Description Fitting Type A in/mm B in/mm C in/mm
POU-10-SV1

POU-10-HV1

POU-10-HSV1

¼ in. Male/Male Face Seal 5.00/127.0 1.50/38.1 1.062/26.9
POU-10-SV3

POU-10-HV3

POU-10-HSV3

½ in. Male/Male Face Seal 5.00/127.0 1.50/38.1 1.062/26.9
POU-10-ST1 ¼ in. Butt Weld Tube Stubs 5.00/127.0 1.50/38.1 N/A
POU-10-ST3 ½ in. Butt Weld Tube Stubs 5.00/127.0 1.50/38.1 N/A
POU-30

Part Description Fitting Type A in/mm B in/mm C in/mm
POU-30-SV3 ½ in. Male/Male Face Seal 11.22/285.0 1.50/38.1 1.062/26.9
POU-30-ST3 ½ in. Butt Weld Tube Stubs 11.22/285.0 1.50/38.1 N/A
POU-015

Part Description Fitting Type A in/mm B in/mm C in/mm
POU-015-SV1 ¼ in. Male/Male Face Seal 5.00/127.0 0.75/19.0 0.812/20.6
POU-015-ST1 ¼ in. Butt Weld Tube Stubs 5.00/127.0 0.75/19.0 N/A
POU-015-SV3 ½ in. Male/Male Face Seal 5.00/127.0 0.75/19.0 0.875/22.2

*Custom designs and fittings available.

Flow Curves

Consult cutsheets or factory for filter flow curves.

Our Design Capabilities

  • Flow/pressure drop curves and filtration efficiency for virtually any system design
  • Gas compatibility considerations
  • Custom filter media, pressure vessel, and fitting material and configurations available

Relevant Services

Design Expertise – From start to finish, we customize solutions based on your design parameters – challenge us!

Fluid Modeling – Our extensive applications have built a library of data to increase the accuracy of our flow models to provide initial performance and feasibility estimates prior to building prototypes.

Extensive Partner Network – If a material is not listed or capability not in-house, we maintain an extensive network of partners for new material procurement, advanced manufacturing capabilities, and validation testing.

Engineering Support – Utilize our expert engineers to design or choose the right point of use filters for your application.