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GasShield® Point of Use Filters

For maximum gas filtration efficiency, reliability, and industry-leading flow consistency, GasShield® Point of Use Filters are ideal for Ultra High Purity (UHP) gas delivery applications. Point of Use Filters are available in a variety of materials and compatible with most high purity electronics grade process gases.

Information Request

Have a question? Can’t find what you’re looking for? Call us at 860.747.6333, or submit an information request form and someone will get back to you within 48 hours.

Product Specs

Operating Conditions

» Maximum Operating Pressure: Up to 3750 psig (258 barg)

» Maximum Operating Temperature for Inert Gas: 460°C

» Maximum Differential Pressure: 1000 psid (68.9 bar)

Materials

» Hardware: Stainless Steel, Stainless Steel VAR, or Hastelloy® C-22

» Filter Medium: Stainless Steel, Nickel, Hastelloy® C-22, or Stainless Steel Fiber

» Wetted Hardware Surface Finish: 5 Ra Electro-polished for stainless steel hardware, 5 Ra for Hastelloy® hardware

» Custom options available

Specifications
Particle Removal Size: ≥ 0.0015 μm
Filter Efficiency (Log Reduction Value): 9 LRV (99.9999999% reduction in particles).

Confirmed at the most penetrating particle size of 0.08 μm per SEMI F38-0699 test method

Helium Leak Rating: 1 x 10-9 atm cc/sec
Moisture Contribution: <10 ppb after 1 hour at low-flow ambient purge per SEMI F27 test method
Total Hydrocarbons: Below detectable limits per SEMASPEC 90120396B test method
Particle Shedding: Zero particle contribution above background (<1 particle/ft³) per SEMI F43-0308 test method
Fittings & Dimensions
POU-03

Part Description Fitting Type A in/mm B in/mm C in/mm
POU-3-SV1

POU-3-HV1

POU-3-HSV1

POU-3-NSV1

¼ in. Male/Male Face Seal 3.31/84.0 1.50/38.1 1.062/26.9
POU-3-SV3

POU-3-HV3

POU-3-HSV3

½ in. Male/Male Face Seal 3.31/84.0 1.50/38.1 1.062/26.9
POU-05

Part Description Fitting Type A in/mm B in/mm C in/mm
POU-05-SV1

POU-05-HV1

POU-05-NSV1

¼ in. Male/Male Face Seal 3.31/84.0 0.75/19.0 0.812/20.6
POU-05-ST1

POU-05-NST1

¼ in. Butt Weld Tube Stubs 3.31/84.0 0.75/19.0 N/A
POU-05-FSV1 ¼ in. Male/Male Face Seal 3.31/84.0 0.75/19.0 0.625/15.9
POU-10

Part Description Fitting Type A in/mm B in/mm C in/mm
POU-10-SV1

POU-10-HV1

POU-10-HSV1

¼ in. Male/Male Face Seal 5.00/127.0 1.50/38.1 1.062/26.9
POU-10-SV3

POU-10-HV3

POU-10-HSV3

½ in. Male/Male Face Seal 5.00/127.0 1.50/38.1 1.062/26.9
POU-10-ST1 ¼ in. Butt Weld Tube Stubs 5.00/127.0 1.50/38.1 N/A
POU-10-ST3 ½ in. Butt Weld Tube Stubs 5.00/127.0 1.50/38.1 N/A
POU-30

Part Description Fitting Type A in/mm B in/mm C in/mm
POU-30-SV3 ½ in. Male/Male Face Seal 11.22/285.0 1.50/38.1 1.062/26.9
POU-30-ST3 ½ in. Butt Weld Tube Stubs 11.22/285.0 1.50/38.1 N/A
POU-015

Part Description Fitting Type A in/mm B in/mm C in/mm
POU-015-SV1 ¼ in. Male/Male Face Seal 5.00/127.0 0.75/19.0 0.812/20.6
POU-015-ST1 ¼ in. Butt Weld Tube Stubs 5.00/127.0 0.75/19.0 N/A
POU-015-SV3 ½ in. Male/Male Face Seal 5.00/127.0 0.75/19.0 0.875/22.2

*Custom designs and fittings available.

Flow Curves

Consult spec sheets or factory for filter flow curves.

Our Design Capabilities

  • Flow/pressure drop curves and filtration efficiency for virtually any system design
  • Gas compatibility considerations
  • Custom filter media, pressure vessel, and fitting material and configurations available

Relevant Services

Design Expertise – From start to finish, we customize solutions based on your design parameters – challenge us!

Fluid Modeling – Our extensive applications have built a library of data to increase the accuracy of our flow models to provide initial performance and feasibility estimates prior to building prototypes.

Extensive Partner Network – If a material is not listed or capability not in-house, we maintain an extensive network of partners for new material procurement, advanced manufacturing capabilities, and validation testing.

Engineering Support – Utilize our expert engineers to consult your process and choose the right point of use filters for your application.