GasShield® Chamber Diffusers
Mott GasShield Chamber Diffusers provide uniform and laminar gas flows without disturbing particles in the chamber. These diffusers also remove particles greater than 0.0015 μm from incoming gas minimizing defects on the wafer. They can withstand higher operating pressures and maintain product integrity for over 6,000,000 cycles.
Literature & Data Sheets
Chamber Diffusers are used for venting in the following applications:
» load lock chambers
» transfer chambers
» cooling chambers, and
» process chambers
of semiconductor equipment interfaces (CVD, PVD, Etch, Epi) or other vacuum chambers
» Max Operating Pressure: 60 psig (4.2 barg)
» Max Operating Temperature for Inert Gas
860°F (460°C) without o-ring
212°F (100°C) with o-ring
» Max Differential Pressure: 75 psid (5.0 bar)
See HP Diffuser Installation Guide
Note: For VCR® fittings, always tighten nut by hand, then 1/8 turn past hand-tight by wrench (VCR-compatible wrench) to ensure proper fit.
» Hardware: 316L SS or Hastelloy® C-22
» Filter Medium: 316L SS Fiber or Hastelloy® C-22
» Wetted Hardware Surface Finish: 10 Ra, Electro-polished
Flow curves available. Consult spec sheets and factory for more information.
|Connections & Dimensions||
*Custom designs and fittings available.
Videos & Articles
Our Design Capabilities
- Flow/pressure drop curves and filtration efficiency for virtually any system design
- Gas compatibility considerations
- Custom filter media, pressure vessel, and fitting material and configurations available
Design Expertise – From start to finish, we customize solutions based on your design parameters – challenge us!
Fluid Modeling – Our extensive applications have built a library of data to increase the accuracy of our flow models to provide initial performance and feasibility estimates prior to building prototypes.
Extensive Partner Network – If a material is not listed or capability not in-house, we maintain an extensive network of partners for new material procurement, advanced manufacturing capabilities, and validation testing.
Engineering Support – Utilize our expert engineers to consult your process and design the right chamber diffusers for your application.
- Product Overview
- Literature & Data Sheets
- Product Specs
- Videos & Articles
- Design Capabilities
- Relevant Services