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GasShield® Chamber Diffusers

Mott GasShield Chamber Diffusers provide uniform and laminar gas flows without disturbing particles in the chamber. These diffusers also remove particles greater than 0.0015 μm from incoming gas minimizing defects on the wafer. They can withstand higher operating pressures and maintain product integrity for over 6,000,000 cycles.

Information Request

Have a question? Can’t find what you’re looking for? Call us at 860.747.6333, or submit an information request form and someone will get back to you within 48 hours.

Product Specs

Operating Conditions

» Max Operating Pressure: 60 psig (4.2 barg)

» Max Operating Temperature for Inert Gas

860°F (460°C) without o-ring

212°F (100°C) with o-ring

» Max Differential Pressure: 75 psid (5.0 bar)

Materials

» Hardware: 316L SS or Hastelloy® C-22

» Filter Medium: 316L SS Fiber or Hastelloy® C-22

» Wetted Hardware Surface Finish: 10 Ra, Electro-polished

Specifications
Particle Removal Size ≥ 0.0015 μm
Particle Shedding: Zero particle contribution above background (<1 particle/ft³) per SEMI F43-0308 test method
Lifetime: 5 years or up to 3,000,000 cycles at max operating pressure (see warranty)
Flow Data

Flow curves available. Consult spec sheets and factory for more information.

 

 

Connections & Dimensions
ISO NW50 Outlet Connection

 

Part Description Fitting Type Inlet Connection Outlet Connection O-Ring Material O-Ring Size O-Ring Groove ID (In/mm) O-Ring Groove OD (In/mm) O-Ring Groove Depth (In/mm)
GSE-FLG-2.0-F1-NW50-316L

 

GSE-FLG-2.0-F1-NW50-C22

¼” Male Swivel

Face Seal

¼” Male Swivel VCR ISO NW50 Viton 2-229 2.36/59.9 2.67/67.9 0.102/2.6
IS NW40 Outlet Connection

Part Description Fitting Type Inlet Connection Outlet Connection O-Ring Material O-Ring Size O-Ring Groove ID (In/mm) O-Ring Groove OD (In/mm) O-Ring Groove Depth (In/mm)
GSE-FLG-1.4-F1-NW40-316L ¼” Male Swivel

Face Seal

¼” Male Swivel VCR IS NW40 Viton 2-224 1.73/44 2.05/52.1 0.102/2.6
IS NW100 (Bolt Through) Outlet Connection

Part Description Fitting Type Inlet Connection Outlet Connection O-Ring Material O-Ring Size O-Ring Groove ID (In/mm) O-Ring Groove OD (In/mm) O-Ring Groove Depth (In/mm)
GSD-FLG-3.6-F1-NW100-0.5-316L ¼” Male Swivel

Face Seal

¼” VCR ISO NW100 Viton 2-246 4.50/114.3 5.12/130.0 0.102/2.6
ISO NW40 Outlet Connection

Part Description Fitting Type Inlet Connection Outlet Connection O-Ring Material O-Ring Size O-Ring Groove ID (In/mm) O-Ring Groove OD (In/mm) O-Ring Groove Depth (In/mm)
GSE-FLG-0.6-2.5-F1-NW40 ¼” Male

Face Seal

¼” Male VCR ISO NW25 Viton 2-224 1.73/44 2.05/52.1 0.102/2.6
ISO NW25 Outlet Connection

Part Description Fitting Type Inlet Connection Outlet Connection O-Ring Material O-Ring Size O-Ring Groove ID (In/mm) O-Ring Groove OD (In/mm) O-Ring Groove Depth (In/mm)
GSE-FLG-0.6-2.5-F1-NW25 ¼” Male

Face Seal

¼” Male VCR ISO NW25 Viton 2-123 1.14/28.9 1.38/35.1 0.075/1.9

*Custom designs and fittings available.

Our Design Capabilities

  • Flow/pressure drop curves and filtration efficiency for virtually any system design
  • Gas compatibility considerations
  • Custom filter media, pressure vessel, and fitting material and configurations available

Relevant Services

Design Expertise – From start to finish, we customize solutions based on your design parameters – challenge us!

Fluid Modeling – Our extensive applications have built a library of data to increase the accuracy of our flow models to provide initial performance and feasibility estimates prior to building prototypes.

Extensive Partner Network – If a material is not listed or capability not in-house, we maintain an extensive network of partners for new material procurement, advanced manufacturing capabilities, and validation testing.

Engineering Support – Utilize our expert engineers to consult your process and design the right chamber diffusers for your application.