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GasShield® Chamber Diffusers

Mott Diffusers provide uniform and laminar gas flows without disturbing particles in the chamber. These diffusers also remove particles greater than 0.0015 μm from incoming gas minimizing defects on the wafer. They can withstand higher operating pressures and maintain product integrity for over 3,000,000 cycles.

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Literature & Data Sheets

Typical Applications

Vent applications on:

» load lock chambers

» transfer chambers

» cooling chambers, and

» process chambers

of Semiconductor equipment interfaces (CVD, PVD, Etch, Epi) or other vacuum chambers

 

Product Literature

  • GasShield® Diffuser Series Datasheets

Product Specs

Operating Conditions

» Max Operating Pressure: 60 psig (4.2 barg)

» Max Operating Temperature for Inert Gas

860°F (460°C) without o-ring

212°F (100°C) with o-ring

» Max Differential Pressure: 75 psid (5.0 bar)

Materials

» Hardware: 316L SS or Hastelloy® C-22

» Filter Medium: 316L SS Fiber or Hastelloy® C-22

» Wetted Hardware Surface Finish: 10 Ra, Electro-polished

Specifications
Particle Removal Size ≥ 0.0015 μm
Particle Shedding: Zero particle contribution above background (<1 particle/ft³) per SEMI F43-0308 test method
Lifetime: 5 years or up to 3,000,000 cycles at max operating pressure (see warranty)
Flow Data

Connections & Dimensions
ISO NW50 Outlet Connection

 

Part Description Fitting Type Inlet Connection Outlet Connection O-Ring Material O-Ring Size O-Ring Groove ID (In/mm) O-Ring Groove OD (In/mm) O-Ring Groove Depth (In/mm)
GSE-FLG-2.0-F1-NW50-316L

 

GSE-FLG-2.0-F1-NW50-C22

¼” Male Swivel

Face Seal

¼” Male Swivel VCR ISO NW50 Viton 2-229 2.36/59.9 2.67/67.9 0.102/2.6
IS NW40 Outlet Connection

Part Description Fitting Type Inlet Connection Outlet Connection O-Ring Material O-Ring Size O-Ring Groove ID (In/mm) O-Ring Groove OD (In/mm) O-Ring Groove Depth (In/mm)
GSE-FLG-1.4-F1-NW40-316L ¼” Male Swivel

Face Seal

¼” Male Swivel VCR IS NW40 Viton 2-224 1.73/44 2.05/52.1 0.102/2.6
IS NW100 (Bolt Through) Outlet Connection

Part Description Fitting Type Inlet Connection Outlet Connection O-Ring Material O-Ring Size O-Ring Groove ID (In/mm) O-Ring Groove OD (In/mm) O-Ring Groove Depth (In/mm)
GSD-FLG-3.6-F1-NW100-0.5-316L ¼” Male Swivel

Face Seal

¼” VCR ISO NW100 Viton 2-246 4.50/114.3 5.12/130.0 0.102/2.6
ISO NW40 Outlet Connection

Part Description Fitting Type Inlet Connection Outlet Connection O-Ring Material O-Ring Size O-Ring Groove ID (In/mm) O-Ring Groove OD (In/mm) O-Ring Groove Depth (In/mm)
GSE-FLG-0.6-2.5-F1-NW40 ¼” Male

Face Seal

¼” Male VCR ISO NW25 Viton 2-224 1.73/44 2.05/52.1 0.102/2.6
ISO NW25 Outlet Connection

Part Description Fitting Type Inlet Connection Outlet Connection O-Ring Material O-Ring Size O-Ring Groove ID (In/mm) O-Ring Groove OD (In/mm) O-Ring Groove Depth (In/mm)
GSE-FLG-0.6-2.5-F1-NW25 ¼” Male

Face Seal

¼” Male VCR ISO NW25 Viton 2-123 1.14/28.9 1.38/35.1 0.075/1.9

*Custom designs and fittings available.

Our Design Capabilities

  • 316L SS, Hastelloy® C-22 or Nickel Media
  • 316L SS or Hastelloy® C-22 Hardware
  • Custom configurations available

Relevant Services

Engineering Support – Utilize our expert project engineers to consult your process and design the right filter elements to maximize flow and particle capture.