GasShield® Chamber Diffusers
Mott Diffusers provide uniform and laminar gas flows without disturbing particles in the chamber. These diffusers also remove particles greater than 0.0015 μm from incoming gas minimizing defects on the wafer. They can withstand higher operating pressures and maintain product integrity for over 3,000,000 cycles.
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Literature & Data Sheets
Typical Applications
Vent applications on:
» load lock chambers
» transfer chambers
» cooling chambers, and
» process chambers
of Semiconductor equipment interfaces (CVD, PVD, Etch, Epi) or other vacuum chambers
Product Literature
- GasShield® Diffuser Series Datasheets
Product Specs
| Operating Conditions |
» Max Operating Pressure: 60 psig (4.2 barg) » Max Operating Temperature for Inert Gas 860°F (460°C) without o-ring 212°F (100°C) with o-ring » Max Differential Pressure: 75 psid (5.0 bar) |
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| Materials |
» Hardware: 316L SS or Hastelloy® C-22 » Filter Medium: 316L SS Fiber or Hastelloy® C-22 » Wetted Hardware Surface Finish: 10 Ra, Electro-polished |
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| Specifications |
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| Flow Data |
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| Connections & Dimensions |
*Custom designs and fittings available. |
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Videos & Articles
Our Design Capabilities
- 316L SS, Hastelloy® C-22 or Nickel Media
- 316L SS or Hastelloy® C-22 Hardware
- Custom configurations available
Relevant Services
Engineering Support – Utilize our expert project engineers to consult your process and design the right filter elements to maximize flow and particle capture.
