GasShield® Chamber Diffusers

Mott diffusers provide uniform and laminar gas flows without disturbing particles in the chamber. These diffusers remove particles greater than 0.0015 μm from incoming gas, to minimize defects on the wafer. They can withstand higher operating pressures and have been shown to maintain product integrity for over 3,000,000 cycles.

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Literature & Data Sheets

Typical Applications

Vent applications on:

» load lock chambers

» transfer chambers

» cooling chambers, and

» process chambers

of Semiconductor equipment interfaces (CVD, PVD, Etch, Epi) or other vacuum chambers

Product Literature

GasShield® Diffuser Series Datasheets

Product Specs

Operating Conditions

» Max Operating Pressure: 60 psig (4.2 barg)

» Max Operating Temperature for Inert Gas

860°F (460°C) without o-ring

212°F (100°C) with o-ring

» Max Differential Pressure: 75 psid (5.0 bar)

Materials

» Hardware: 316L SS or Hastelloy® C-22

» Filter Medium: 316L SS Fiber or Hastelloy® C-22

» Wetted Hardware Surface Finish: 10 Ra, Electro-polished

Specifications

Particle Removal Size	≥ 0.0015 μm
Particle Shedding:	Zero particle contribution above background (<1 particle/ft³) per SEMI F43-0308 test method
Lifetime:	5 years or up to 3,000,000 cycles at max operating pressure (see warranty)

Flow Data

Connections & Dimensions

ISO NW50 Outlet Connection
Part Description	Fitting Type	Inlet Connection	Outlet Connection	O-Ring Material	O-Ring Size	O-Ring Groove ID (In/mm)	O-Ring Groove OD (In/mm)	O-Ring Groove Depth (In/mm)
GSE-FLG-2.0-F1-NW50-316L GSE-FLG-2.0-F1-NW50-C22	¼” Male Swivel Face Seal	¼” Male Swivel VCR	ISO NW50	Viton	2-229	2.36/59.9	2.67/67.9	0.102/2.6
IS NW40 Outlet Connection
Part Description	Fitting Type	Inlet Connection	Outlet Connection	O-Ring Material	O-Ring Size	O-Ring Groove ID (In/mm)	O-Ring Groove OD (In/mm)	O-Ring Groove Depth (In/mm)
GSE-FLG-1.4-F1-NW40-316L	¼” Male Swivel Face Seal	¼” Male Swivel VCR	IS NW40	Viton	2-224	1.73/44	2.05/52.1	0.102/2.6
IS NW100 (Bolt Through) Outlet Connection
Part Description	Fitting Type	Inlet Connection	Outlet Connection	O-Ring Material	O-Ring Size	O-Ring Groove ID (In/mm)	O-Ring Groove OD (In/mm)	O-Ring Groove Depth (In/mm)
GSD-FLG-3.6-F1-NW100-0.5-316L	¼” Male Swivel Face Seal	¼” VCR	ISO NW100	Viton	2-246	4.50/114.3	5.12/130.0	0.102/2.6
ISO NW40 Outlet Connection
Part Description	Fitting Type	Inlet Connection	Outlet Connection	O-Ring Material	O-Ring Size	O-Ring Groove ID (In/mm)	O-Ring Groove OD (In/mm)	O-Ring Groove Depth (In/mm)
GSE-FLG-0.6-2.5-F1-NW40	¼” Male Face Seal	¼” Male VCR	ISO NW25	Viton	2-224	1.73/44	2.05/52.1	0.102/2.6
ISO NW25 Outlet Connection
Part Description	Fitting Type	Inlet Connection	Outlet Connection	O-Ring Material	O-Ring Size	O-Ring Groove ID (In/mm)	O-Ring Groove OD (In/mm)	O-Ring Groove Depth (In/mm)
GSE-FLG-0.6-2.5-F1-NW25	¼” Male Face Seal	¼” Male VCR	ISO NW25	Viton	2-123	1.14/28.9	1.38/35.1	0.075/1.9